Master Controller Recipe Set Synchronization
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Solution Overview
Problem
Plasma processing systems face challenges with tight time windows and limited data transfer rates between processing devices, leading to costly equipment and inefficiencies in synchronizing the execution of recipe sets in plasma systems.
Innovation Solution
A method where a master controller sends recipe sets to slave controllers before a pulse signal, allowing them to prepare for execution, and using high-speed communication protocols like UDP over IP to transfer data at gigabits per second, eliminating the need for time windows and reducing costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If recipe sets are sent and executed within tight time windows between processing devices, then synchronization is achieved, but processing devices become costly and data transfer rates are limited
Solution Approach 1:
The master controller sends the recipe set to slave controllers in advance, before the execution pulse is generated. This preliminary transmission allows slave controllers to prepare for execution without requiring tight time windows during actual execution, thereby reducing the complexity and cost of processing devices while maintaining synchronization reliability
2Reliability
If recipe sets are sent and executed within tight time windows between processing devices, then synchronization is achieved, but data transfer rates are limited
Solution Approach 1:
By sending recipe sets in advance during a first clock cycle and executing them during a subsequent second clock cycle, the system eliminates the need for high-speed data transfer during execution. The preliminary transmission phase can use standard communication protocols, while the execution phase benefits from pre-loaded data, thereby improving overall data transfer speed without compromising synchronization
3Reliability
If slave controllers execute recipe sets within a time window, then synchronization is maintained, but the time window constraint adds to system cost
Solution Approach 1:
The system separates the recipe set transmission from the execution trigger. The master controller sends recipe sets to slave controllers in advance, then generates an execution pulse at the appropriate time. This eliminates the need for slave controllers to simultaneously receive and execute within a tight time window, removing the time window constraint while maintaining synchronization across all slave controllers
Data Source
AI summary
Systems and methods for synchronizing execution of recipe sets are described. One of the methods includes sending by a command controller to a master controller a recipe set and sending by the master controller the recipe set for execution by a sub-system controller of a plasma system. The operation of sending the recipe set from the master controller to the sub-controller is performed during a first clock cycle of a clock signal. The method includes generating by the command controller a recipe event signal and sending by the command controller to the sub-system controller the recipe event signal indicating a time of execution of the recipe set by the sub-system controller. The time of execution occurs during a second clock cycle that follows the first clock cycle. The second cycle is of the clock signal.