Large Area Master Mold Manufacturing via Replica Resin Layering
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Solution Overview
Problem
The existing photolithography process for manufacturing master molds is limited in producing fine patterns over large areas, making it inefficient for fields requiring fine pattern transfers in semiconductor circuits, HDDs, molecular memories, and other applications.
Innovation Solution
A method involving the formation of replica resin layers using a mold, bonding them to create a replica template, and then forming a flexible stamp with a pattern to transfer the design to a mold resin, allowing for the etching of a large area master mold on a substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If photolithography process is used to manufacture master mold, then fine pattern can be formed, but the manufacturable area is limited
Solution Approach 1:
The master mold manufacturing process is divided into multiple stages: first creating a master mold with fine patterns using photolithography, then using this master mold to create replica molds through replica resin layers, and finally assembling multiple replica molds into a large-area master mold. This segmentation allows fine pattern formation in a small area to be replicated and expanded to large areas.
Solution Approach 2:
The invention creates replica resin layers that copy the fine patterns from the original master mold. These replica layers are then used to form replica molds that replicate the nanoscale features. By copying the fine patterns multiple times and assembling them, large-area master molds with fine patterns are achieved without directly photolithographing the entire large area.
2Manufacturing precision
If photolithography process is used, then pattern can be formed, but productivity for large area manufacturing is low
Solution Approach 1:
The fine patterns are pre-formed on a small master mold using photolithography. This master mold is then used to create multiple replica resin layers that are assembled into a large-area structure. The etching process is performed in advance on the substrate using this assembled structure as a mask, allowing parallel processing of large areas without repeated photolithography cycles.
Solution Approach 2:
Multiple replica resin layers are created by copying the fine patterns from the original master mold. These replicated structures are then assembled and used to transfer patterns to large-area substrates through a single etching process, significantly improving productivity compared to direct photolithography of large areas.
3Area of stationary object
If multiple molds are used to form replica resin layers, then large area coverage is achieved, but alignment precision becomes difficult to maintain
Solution Approach 1:
Multiple replica resin layers are stacked and bonded together in a nested configuration, with each layer containing fine patterns that align with adjacent layers. The layers are bonded through adhesive layers or direct bonding, creating a multi-layered structure where alignment is maintained through the bonding process and overlapping pattern regions.
Solution Approach 2:
The invention transitions from two-dimensional planar assembly to three-dimensional stacked configuration of replica resin layers. By bonding multiple layers vertically, large-area coverage is achieved while maintaining alignment through the vertical stacking and bonding process, rather than attempting to align multiple molds in a plane.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the efficient manufacturing of large area master molds with uniform patterns, overcoming the limitations of traditional photolithography by allowing for the production of nano-scale features over extensive areas.
Implementation Method 1
providing an adhesive layer between the plurality of replica resin layers and the template
Implementation Method 2
the forming the flexible stamp may include using a capillary force lithography
Implementation Method 3
forming the master mold having a large area by etching a surface of a substrate based on a pattern shape of the mold resin
Data Source
AI summary
A method of manufacturing a master mold includes forming a plurality of replica resin layers using a mold; forming a replica template by bonding the plurality of replica resin layers on a template; forming a replica mold layer having a pattern corresponding to a pattern of the plurality of replica resin layers using the replica template; forming a flexible stamp having a pattern formed on a surface thereof using the replica mold layer; transferring the pattern formed on the surface of the flexible stamp to a mold resin; and forming a large area master mold by etching a surface of a substrate based on a pattern shape of the mold resin.