Master Stamp for Nano Imprinting with Segmented Pattern Groups
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Solution Overview
Problem
The existing nano imprinting techniques face challenges in reducing manufacturing costs and improving the durability and reusability of stamps for large-area devices, such as display panels, which limits their efficiency and productivity.
Innovation Solution
A stamp for nano imprinting is designed with a base substrate having pattern groups with varying widths and dummy patterns, allowing for efficient transfer of nano patterns across different areas using the same mold stamp, thereby reducing manufacturing costs and time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single stamp is used for repeatedly imprinting large-area devices, then productivity is improved, but manufacturing cost increases due to stamp durability requirements
Solution Approach 1:
The stamp is divided into multiple pattern groups (first pattern group and second pattern group) with different pattern parts having different widths. This segmentation allows different regions of the stamp to be optimized for different functions, enabling repeated use while maintaining pattern quality and reducing overall manufacturing cost.
Solution Approach 2:
Different pattern parts within the same stamp have different widths tailored to specific imaging requirements. The first pattern part has a first width suitable for first imaging areas, while the second pattern part has a second width suitable for second imaging areas. This local quality optimization ensures each region performs its function effectively, extending stamp durability and reducing replacement costs.
2Manufacturing precision
If multiple stamps with different pattern widths are manufactured separately, then pattern precision is improved for different areas, but device complexity and manufacturing time increase
Solution Approach 1:
Multiple pattern groups with different pattern widths are merged into a single stamp structure. The first pattern group and second pattern group coexist on the same base substrate, each with their respective pattern parts having optimized widths for different imaging areas. This merging maintains high pattern precision while reducing the number of separate stamps needed.
Solution Approach 2:
The single stamp serves multiple functions by incorporating different pattern widths for different imaging areas. It can simultaneously or sequentially imprint both first imaging areas requiring first width patterns and second imaging areas requiring second width patterns, eliminating the need for multiple specialized stamps and reducing overall system complexity.
3Manufacturing precision
If pattern parts with different widths are arranged sequentially, then pattern alignment is improved across imaging areas, but stamp area increases
Solution Approach 1:
Pattern parts with different widths are arranged not only in the first direction (width variation) but also in the second direction (sequential arrangement). This two-dimensional arrangement optimizes space utilization on the stamp substrate, achieving proper pattern alignment across different imaging areas while minimizing the overall stamp area required.
Data Source
AI summary
A stamp for nano imprinting includes a base substrate, a first pattern part and a second pattern part disposed on the base substrate and having different widths, and a third pattern part and a fourth pattern part having different widths. Each of the first pattern part to the fourth pattern part includes a plurality of nano patterns, and the first pattern part and the second pattern part and the third pattern part and the fourth pattern are disposed to be arranged adjacent to each other in a sequential order in the first direction.