Solid-State Match Synchronization for Low-Dissipation PIN Switching

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Solution Overview

Problem

High dissipation during transitions of PIN diodes in solid-state match circuits limits the reliability and efficiency of power delivery systems, particularly in plasma processing, due to the inability to sustain high repetition rates without significant power loss.

Innovation Solution

Implement a synchronization module to control power delivery from the generator, pausing, reducing, or resuming power during switch transitions in the solid-state match network based on timing information and temperature feedback to minimize dissipation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If PIN diodes are switched at high repetition rates to enable faster matching, then switching speed is improved, but power dissipation increases during transition periods

Engineering Contradiction:

Improveswitching speedVSAvoidpower dissipation

Core Design Contradiction:

SpeedVSLoss of energy

Solution Approach 1:

The system performs preliminary actions by pausing or reducing power delivery before the PIN diode switching transition occurs. The synchronization module detects the switching timing and proactively reduces power to the match network during the transition period, preventing high dissipation from occurring in the first place rather than reacting after the problem arises.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system implements feedback by using the synchronization module to monitor the switching state of PIN diodes and adjust power delivery accordingly. The module receives timing information about when switching occurs and provides real-time control feedback to the power amplifier, dynamically adjusting power levels to minimize dissipation during transitions while maintaining normal operation during stable states.

Inventive Principle:

Principle #23Feedback

2Loss of energy

If power is reduced during switch transitions to minimize dissipation, then energy loss is reduced, but power delivery to the load is interrupted

Engineering Contradiction:

Improvepower dissipationVSAvoidpower delivery continuity

Core Design Contradiction:

Loss of energyVSProductivity

Solution Approach 1:

The system applies periodic action by implementing brief, rhythmic power interruptions that are synchronized with the switching transitions. Rather than continuous power reduction, the system uses short, periodic pauses or reductions in power delivery that coincide with switching events. This periodic approach minimizes energy loss during transitions while the brief duration of each interruption limits the impact on overall productivity.

Inventive Principle:

Principle #19Periodic action

3Productivity

If switching repetition rate is increased to improve process control, then matching speed is improved, but reliability decreases due to high dissipation

Engineering Contradiction:

Improvematching speedVSAvoidsystem reliability

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The system provides beforehand cushioning by reducing power levels before the switching transitions occur. This cushioning effect protects the PIN diodes from experiencing excessive dissipation stress during high-rate switching operations. By preemptively lowering power during transition periods, the system enables sustained high repetition rate switching without compromising the reliability or lifespan of the switching components.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Reduces power dissipation in switches, allowing for persistent switching at high repetition rates with minimal impact on load power delivery, enhancing system reliability and process control.

Implementation Method 1

Methodology Applied

Scientific EffectPower dissipation reduction through synchronized control:

Implementation Method 2

PIN diodes obey conventional diode behavior at low frequency input signals, but at higher input signal frequencies, operate as a resistor in the forward biased or ON state and as a small capacitor in the reverse biased or OFF state

Methodology Applied

Scientific EffectDiode switching behavior: Diode

Implementation Method 3

for short periods of time (∼2 μs) while the PIN diode is transitioning between the ON and OFF states, dissipation due to high applied RF voltages and currents can be high

Methodology Applied

Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS12580156B2Solid-state match (SSM)-generator synchronization

Publication Date: 2026.03.17 ADVANCED ENERGY IND INC

AI summary

This disclosure describes systems, methods, and apparatuses for a power system comprising a generator connected to a solid-state match network and a synchronization module connected to the generator and the solid-state match network, wherein the synchronization module is configured to synchronize a power delivered by the generator to the match network with the opening and closing of switches in the solid-state matching network.