Meandering Oscillator Electrode Merging for Small-Scale Productivity
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Solution Overview
Problem
Conventional meandering oscillators face productivity issues as they become smaller due to the difficulty in forming wires for piezoelectric actuators on oscillating plates, leading to reduced production efficiency and electrical insulating problems.
Innovation Solution
Piezoelectric actuators are alternately arranged on oscillating plates, allowing for a single continuous upper electrode and narrower wire to be shared across multiple plates, reducing the number of electrodes needed and improving productivity by simplifying electrode arrangement even at smaller sizes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If piezoelectric actuators are respectively arranged on each oscillating plate with independent upper electrodes, then each plate can be driven independently in opposite phases to accumulate displacement, but the number of wires and electrodes increases making it difficult to form on very small oscillating plates
Solution Approach 1:
The patent merges the upper electrodes of adjacent piezoelectric actuators into a single continuous electrode structure that spans multiple oscillating plates. This continuous electrode is divided into multiple regions corresponding to different actuators, allowing independent voltage application to adjacent plates while reducing the total number of discrete electrodes and wires needed. The merging approach maintains the ability to drive plates in opposite phases while simplifying the overall electrode configuration.
Solution Approach 2:
The continuous upper electrode serves multiple functions simultaneously: it acts as the upper electrode for multiple piezoelectric actuators across different oscillating plates, provides electrical connection points for voltage application, and maintains structural integrity across the meandering oscillator assembly. This multi-functional design reduces the number of separate components needed while preserving the ability to independently control adjacent plates.
2Volume of moving object
If the meandering oscillator is made smaller to reduce size, then the device becomes more compact, but the difficulty of forming wires on oscillating plates increases and productivity decreases
Solution Approach 1:
By merging multiple upper electrodes into a single continuous electrode structure, the patent reduces the total number of discrete components that need to be manufactured and assembled. This simplification is particularly beneficial for small-scale production where the complexity of forming and positioning multiple separate wires and electrodes on tiny oscillating plates would significantly reduce productivity. The continuous electrode can be formed as a single piece or with fewer segmentation points.
Solution Approach 2:
The continuous upper electrode is designed with different regional characteristics to optimize local functions: wider sections where multiple actuators are located to provide sufficient electrical contact area, narrower transition zones between oscillating plates, and specific connection points for voltage application. This local variation in electrode geometry allows the structure to maintain functionality across different scales while simplifying the overall manufacturing process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This arrangement enhances the productivity of small optical reflecting elements by allowing easier electrode placement and reducing unnecessary vibrations, while maintaining stable vibration properties and increasing the amplitude of the mirror portion, thus improving the overall production efficiency.
Implementation Method 1
piezoelectric actuators 2 respectively arranged on oscillating plates 1A to 1F. Piezoelectric actuator 2 includes a lower electrode, a piezoelectric body, and an upper electrode
Implementation Method 2
adjacent oscillating plates 1A to 1F are caused to perform flexural oscillation in directions 180 degrees apart. The above-described flexural oscillation in the opposite directions can accumulate displacement about a rotational axis
Data Source
AI summary
A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved.


