Measuring Chain Repeatability Verification via Segmented Test Units
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Solution Overview
Problem
Current methodologies for checking repeatability and reproducibility in measuring systems, particularly in semiconductor device testing, are inefficient and costly due to reliance on golden samples, which are often damaged and require extensive resources, making it difficult to ensure consistent measurement across different products and measuring chains.
Innovation Solution
The method involves breaking down the measuring chain into basic test units, checking repeatability and reproducibility separately, and then correlating the results to evaluate the entire chain, using software and/or hardware fixtures with a testing protocol to assess each unit's performance independently of the specific product, thereby reducing dependence on golden samples.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If current R&R methodologies are used with golden samples for each individual product, then measurement repeatability and reproducibility can be checked, but the process becomes extremely resource-intensive and costly
Solution Approach 1:
The patent segments the measuring chain into individual test units (TU) that can be independently evaluated. Instead of assessing the entire measuring chain as a single integrated system requiring golden samples, each test unit is separated and checked independently using self-contained test circuits, dramatically reducing resource requirements while maintaining reliability verification.
Solution Approach 2:
The patent introduces intermediary test circuits embedded within each test unit that serve as internal reference standards. These intermediary circuits provide the necessary reference measurements without requiring external golden samples, enabling R&R verification through internal self-testing mechanisms.
2Reliability
If golden samples are used for R&R checking, then measurement consistency can be verified, but the golden samples are frequently damaged and require replacement
Solution Approach 1:
Each test unit is equipped with self-contained test circuits that enable the unit to test itself without requiring external golden samples. This self-service capability eliminates the need for vulnerable golden samples while maintaining the ability to verify measurement consistency through internal reference measurements.
Solution Approach 2:
The patent replaces expensive, fragile golden samples with inexpensive, durable test circuits that are integrated into each test unit. These test circuits are designed to withstand repeated testing without damage, effectively eliminating the loss and replacement issues associated with traditional golden samples.
3Reliability
If extensive R&R checking is performed on complete measuring chains, then measurement quality can be ensured, but the process time and productivity are significantly reduced
Solution Approach 1:
By segmenting the measuring chain into independent test units with embedded self-test capabilities, the patent enables parallel verification of multiple units simultaneously. This eliminates the sequential bottleneck of complete chain verification while maintaining comprehensive quality coverage through individual unit assessment.
Solution Approach 2:
The test circuits are pre-integrated into each test unit during manufacturing, performing the verification function in advance. This preliminary action eliminates the need for time-consuming post-assembly R&R checking of complete measuring chains, as each unit is already verified to meet measurement quality requirements.
Data Source
AI summary
A method provides an improved checking of repeatability and reproducibility of a measuring chain, in particular for quality control by semiconductor device testing. The method includes testing steps provided for multiple and different devices to be subjected to measurement or control through a measuring system that includes at least one chain of measuring units between a testing apparatus (ATE) and each device to be subjected to measurement or control. Advantageously, the method comprises checking repeatability and reproducibility of each type of unit that forms part of the measuring chain and, after the checking, making a correlation between the various measuring chains as a whole to check repeatability and reproducibility, using a corresponding device subjected to measurement or control.