Measuring Jig Weight Detection for Liquid Ejection Precision
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Solution Overview
Problem
Existing substrate processing systems face challenges in accurately controlling the amount of processing liquids ejected onto substrates, particularly during the miniaturization of patterns, which requires precise measurement and adjustment of liquid supply conditions.
Innovation Solution
A substrate processing system is designed with a placement stage, a measuring unit, a measuring jig, a liquid processing unit, and a controller that transfers the measuring jig between the measuring unit and the liquid processing unit, allowing for the calculation of the ejection amount of processing liquids based on weight measurements, enabling precise control and adjustment of supply conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a substrate processing system ejects processing liquids onto substrates for miniaturization processing, then manufacturing precision is improved, but measurement precision of liquid amount deteriorates
Solution Approach 1:
A measuring jig is introduced as an intermediary object to receive the processing liquid from the liquid processing unit. The jig includes a container that collects the ejected liquid and a weight measurement unit that measures the liquid amount indirectly through weight, thereby enabling precise measurement without interfering with the substrate processing system's high-precision liquid ejection
Solution Approach 2:
The patent replaces direct visual or optical measurement methods with a mechanical weight-based measurement system. The weight measurement unit measures the weight of the container with processing liquid, and the control unit calculates the liquid amount based on weight difference, providing high measurement precision that complements the high manufacturing precision requirements
2Measurement precision
If manual measurement operations are performed to adjust liquid supply conditions, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The system implements self-service measurement where the measuring jig automatically receives the processing liquid from the liquid processing unit, and the weight measurement unit automatically measures the liquid amount. The control unit then automatically calculates the liquid amount and adjusts supply conditions without requiring manual measurement operations, thereby maintaining measurement precision while reducing operational complexity
Solution Approach 2:
The control unit uses the weight measurement data to provide feedback on the actual liquid amount ejected. Based on this feedback, the system can automatically adjust the liquid supply conditions to achieve the desired liquid amount, creating a closed-loop control system that improves measurement precision while automating the adjustment process to reduce complexity
3Productivity
If processing liquid is ejected directly onto substrate without intermediate measurement, then productivity is improved, but measurement precision deteriorates
Solution Approach 1:
The system is segmented into distinct functional units: the liquid processing unit that ejects liquid onto the substrate, and the measuring jig that separately measures the liquid amount. This segmentation allows the substrate processing to proceed with high productivity while the measurement function is performed independently with high precision, without interfering with the main processing flow
Solution Approach 2:
The measuring jig is prepared in advance with an empty container, and the weight measurement unit is calibrated before the liquid ejection process. After the liquid processing unit ejects the processing liquid onto the substrate, the jig measures the actual amount. This preliminary preparation ensures that measurement can be performed with high precision without disrupting the productivity of the substrate processing operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This system facilitates accurate measurement and adjustment of processing liquid ejection amounts, ensuring high precision and safety in substrate processing, reducing operator intervention, and simplifying the measurement process while suppressing volatilization of volatile liquids.
Implementation Method 1
a measuring unit configured to be removable from the placement portion and to measure a weight of an object to be measured
Data Source
AI summary
A substrate processing system includes: a measuring unit provided detachably with respect to a placement portion of a placement stage; a measuring jig for measuring a processing liquid; a liquid processing unit including a supplier which supplies the processing liquid to the measuring jig; a transfer mechanism for transferring the measuring jig between the measuring unit and the liquid processing unit; and a controller. The controller executes: a process of transferring the measuring jig in the measuring unit from the measuring unit to the liquid processing unit; a process of ejecting the processing liquid from the supplier to the measuring jig; a third process of transferring the measuring jig from the liquid processing unit to the measuring unit; and a fourth process of calculating an ejection amount of the processing liquid based on a measurement value in the measuring unit.