Coordinate Measuring Machine Measurement Error Detection
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Solution Overview
Problem
Current coordinate measuring machines are unable to reliably identify incorrect measurements without significantly reducing throughput, affecting the reproducibility and accuracy of measurements.
Innovation Solution
A device and method utilizing reflected or transmitted light illumination, imaging optical systems, and a CCD camera with linked program portions to detect and analyze measurement variables, identifying incorrect measurements through statistical analysis and quality factors to minimize repeat measurements and maintain high throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If repeated measurements are performed to identify incorrect measurements, then measurement reliability is improved, but measurement throughput deteriorates
Solution Approach 1:
The patent applies preliminary action by calculating quality factors from measurement variables immediately after each measurement is taken, before determining whether the measurement is correct. This allows the system to identify incorrect measurements in real-time without requiring multiple repeated measurements, thus maintaining high throughput while ensuring measurement reliability through immediate quality assessment.
2Measurement precision
If measurement variables are analyzed with multiple program portions to detect incorrect measurements, then measurement accuracy is improved, but device complexity increases
Solution Approach 1:
The patent implements multi-functionality by using a single evaluation unit that performs multiple functions: it receives measurement variables, calculates quality factors, determines measurement correctness, and identifies incorrect measurements. This consolidated approach improves measurement accuracy through comprehensive analysis while avoiding the increased complexity that would result from multiple separate program portions or evaluation units.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively identifies incorrect measurements, optimizing short-term and long-term reproducibility and accuracy while maintaining acceptable throughput by analyzing measurement variables and quality factors, ensuring measurements align within defined limits.
Implementation Method 1
at least one reflected light illumination apparatus and/or one transmitted light illumination apparatus
Implementation Method 2
at least one reflected light illumination apparatus and/or one transmitted light illumination apparatus
Implementation Method 3
the structure on the mask is imaged by at least one imaging optical system on a detector of a camera
Data Source
AI summary
What is disclosed is a device (1) for automatic detection of a possible incorrect measurement, wherein the device (1) comprises at least one reflected light illumination apparatus (14) and/or a transmitted light illumination apparatus (6) and at least one imaging optical system (9) and one detector (11) of a camera (10) for imaging structures (3) on a substrate (2), wherein a first program portion (17) is linked to the detector (11) of the camera (10), said detector being provided for determining the position and/or dimension of the structure (3) on the substrate (2), wherein the device (1) determines and records a plurality of measurement variables Mj, jε{1, . . . , L}, from which at least one variable G can be determined, wherein a second program portion (18) is linked to the detector (11) of the camera (10), said program portion calculating an analysis of the measurement variables Mj with regard to a possible incorrect measurement. Also disclosed is a method for automatic detection of a possible incorrect measurement wherein an analysis of the measurement variables Mj with regard to a possible incorrect measurement is calculated with a second program portion (18) which is linked to the detector (11) of the camera (10).