Measuring Tip Particle Transfer to a Microstructured Deposition Surface
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Solution Overview
Problem
Existing methods for removing contaminants and defects from a lithography mask are inefficient and lack the ability to reliably and efficiently transfer particles from a sample surface to a microstructured surface section.
Innovation Solution
A method using a measuring tip to take up particles from a sample surface and transfer them to a microstructured surface section with a periodic profile, utilizing interactions such as van der Waals and chemical bonds to facilitate efficient deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a measuring tip is used to take up particles from a sample surface, then particle removal capability is improved, but particle transfer efficiency to deposition surface deteriorates
Solution Approach 1:
The deposition surface is pre-structured with microstructures before particle transfer. These microstructures create interaction regions that facilitate particle transfer from the measuring tip by providing favorable surface energy gradients and geometric features that enhance particle-surface interaction.
Solution Approach 2:
The deposition surface is divided into regions with different microstructures. Specific local regions have tailored microstructures optimized for particle transfer, while other regions maintain different properties. This local differentiation enables efficient particle transfer at specific interaction regions without compromising overall system performance.
2Device complexity
If a flat deposition surface is used, then device simplicity is improved, but particle transfer efficiency deteriorates
Solution Approach 1:
The deposition surface is segmented into multiple microstructured elements rather than being a continuous flat surface. These segmented microstructures create discrete interaction regions that enhance particle transfer through localized effects while maintaining overall structural integrity.
Solution Approach 2:
The deposition surface transitions from a two-dimensional flat plane to a three-dimensional microstructured surface. This dimensional change introduces vertical features and complex geometries that create favorable interaction regions for particle transfer, adding functional capability without significantly increasing overall device footprint.
3Ease of manufacture
If particle transfer is performed without microstructured surface, then process simplicity is improved, but particle transfer reliability deteriorates
Solution Approach 1:
The microstructured surface is prepared in advance through manufacturing processes that create the necessary geometric features. This preliminary structuring ensures reliable particle transfer during operation without requiring complex real-time control or adjustment mechanisms.
Solution Approach 2:
The particle transfer mechanism transitions from direct mechanical contact and manipulation to a field-based interaction mediated by the microstructured surface. The surface geometry creates favorable energy landscapes that guide particle transfer through physical-chemical interactions rather than purely mechanical means.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method allows for rapid and reliable removal of particles from the sample surface to the microstructured surface section, enhancing the efficiency and reliability of the particle transfer process.
Implementation Method 1
utilizing interactions such as van der Waals and chemical bonds to facilitate efficient deposition
Implementation Method 2
utilizing interactions such as van der Waals and chemical bonds to facilitate efficient deposition
Data Source
AI summary
The invention proposes a method for processing a sample with a processing arrangement, comprising the steps of:taking up a particle adhering on a sample surface of the sample with a measuring tip of the processing arrangement;modifying a physical and/or chemical nature of a surface section on the sample or on a deposition unit for providing an activated surface section; andmoving the measuring tip into an interaction region of the activated surface section in which an attractive interaction acts between the particle taken up by the measuring tip and the activated surface section in order to transfer the particle from the measuring tip to the activated surface section.