Megasonic Cleaning Assembly for Substrate Charge Discharge

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Solution Overview

Problem

The accumulation of residual charges on the megasonic emission device in substrate processing apparatuses can lead to discharge phenomena on the substrate surface, causing damage.

Innovation Solution

The substrate processing apparatus incorporates an electrostatic conductor assembly, a grounded electric conductor, a conductive nozzle, or ion rods to neutralize and conduct away the residual charges from the megasonic emission device, preventing discharge on the substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the megasonic emission device is used to clean the substrate, then the cleaning effectiveness is improved, but residual charges accumulate on the device causing discharge damage to the substrate

Engineering Contradiction:

Improvesubstrate cleaning qualityVSAvoidsubstrate surface damage from discharge

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a transfer electrode as an intermediary component between the megasonic emission device and the substrate. This transfer electrode accumulates residual charges during the cleaning process and then discharges them to the substrate in a controlled manner, preventing direct discharge damage while maintaining cleaning effectiveness. The transfer electrode acts as a buffer that mediates the charge transfer process.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent implements a preliminary discharge action by introducing a discharge electrode that actively removes residual charges from the megasonic emission device before the cleaning cycle completes. This preliminary discharge prevents charge accumulation that would otherwise lead to harmful discharge events during subsequent operations.

Inventive Principle:

Principle #10Preliminary action

2Loss of energy

If the radio-frequency power supply is disconnected after cleaning, then energy consumption is reduced, but charges cannot be completely discharged and accumulate on the device

Engineering Contradiction:

Improvepower supply energy consumptionVSAvoidcharge discharge completeness

Core Design Contradiction:

Loss of energyVSReliability

Solution Approach 1:

The transfer electrode serves as a mediator that remains connected to the megasonic emission device even when the main radio-frequency power supply is disconnected. It provides an alternative discharge path for residual charges, ensuring complete charge removal without requiring the main power supply to remain connected, thus reducing energy consumption while maintaining discharge reliability.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces the reliance on the radio-frequency power supply's natural discharge mechanism with an active electrostatic discharge mechanism using transfer and discharge electrodes. This substitution allows for controlled charge discharge independent of the main power supply state, ensuring complete discharge even when energy consumption is minimized.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The implementation effectively eliminates static charges on the megasonic emission device, preventing damage to the substrate surface by avoiding residual charge discharges.

Implementation Method 1

high-frequency (0.8 to 1.0 MHZ) alternating current to excite a piezoelectric resonator crystal to generate megasonic wave

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

the megasonic emission device forms a parallel capacitor with the chemical solution 50' and the substrate 40'

Methodology Applied

Scientific EffectCapacitance: Capacitance

Implementation Method 3

an electrostatic conductor assembly provided in the cleaning device and provided for electrically connecting with the megasonic emission device for conducting the charges away from the megasonic emission device

Methodology Applied

Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS20250183059A1Substrate processing apparatus

Publication Date: 2025.06.05 ACM RES (SHANGHAI) INC

AI summary

A substrate processing apparatus, comprising a chamber (1000), a substrate tray (400), a megasonic emission device (30) and a cleaning device (10). The substrate tray (400) is set in the chamber (1000), and it is used to carry a substrate (500). The megasonic emission device (30) is used to transfer megasonic energy to the chemical solution between the megasonic emission device (30) and the substrate (500). The cleaning device (10) is used to clean the megasonic emission device (30), which includes an electrostatic conductor assembly (200), and the conductor assembly (200) is disposed in the cleaning device (10) and is used for electrically connecting with the megasonic emission device (30), so as to conduct the charges away from the megasonic emission device (30), thereby preventing damaging defects on the surface of the substrate (500) due to discharge of the charges accumulated on the megasonic emission device (30).