Single-Crystal Melt Level Imaging for Guide Cylinder Gap Control

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Solution Overview

Problem

In Czochralski single crystal manufacturing, the changing liquid surface of the silicon melt in the crucible affects the growth control and quality of the crystal due to inaccurate monitoring of the melt level.

Innovation Solution

A single crystal growth device with a reflection module and image receiving system that uses light transmission channels and reflection members to accurately monitor the melt level, allowing timely adjustments to maintain the vertical interval between the guide cylinder and the liquid surface.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the crucible is maintained in a fixed position during single crystal growth, then the initial interval between the guide cylinder and liquid surface can be controlled, but the liquid surface drops continuously as the crystal rod grows, causing the interval to change and affecting crystal growth control and quality

Engineering Contradiction:
Improvevertical interval control between guide cylinder and liquid surfaceVSAvoidgrowth control and crystal quality
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent implements a feedback mechanism by using an image receiving module to continuously monitor the liquid surface position of the silicon melt. The image processing system detects the liquid surface height in real-time and provides feedback signals to the crucible lifting device, which automatically adjusts the crucible position to maintain a constant vertical interval between the guide cylinder and liquid surface, thereby resolving the contradiction between initial interval control and maintaining reliability during continuous growth

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent transforms the static crucible positioning into a dynamic system by introducing a crucible lifting device that can continuously adjust the crucible height. This dynamic adjustment capability allows the system to compensate for the dropping liquid surface as the crystal grows, maintaining the optimal vertical interval throughout the growth process and ensuring both manufacturing precision and growth reliability

Inventive Principle:
Principle #15Dynamics

2Measurement precision

If traditional melt level monitoring methods are used, then the device structure remains simple, but the liquid surface position cannot be accurately judged, directly affecting single crystal growth quality

Engineering Contradiction:
Improveliquid surface position detection accuracyVSAvoidmonitoring system structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces an image receiving module and image processing system as intermediary components between the liquid surface and the control system. These intermediaries capture optical images of the liquid surface, process the image data to determine precise liquid level positions, and convert this information into actionable feedback signals, thereby achieving high measurement precision while keeping the overall system architecture modular and manageable

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces traditional mechanical melt level monitoring methods with an optical-based image processing system. Instead of using mechanical probes or contact-based sensors that would complicate the system and potentially contaminate the melt, the invention uses non-contact optical imaging to detect liquid surface position, achieving high measurement precision without significant increase in device complexity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Ensures precise control of the growth environment, enhancing the quality of the single crystal by accurately adjusting the crucible position based on real-time melt level changes.

Implementation Method 1

a first reflection member, the first reflection member is disposed at a communication position of the first light transmission channel and the second light transmission channel, and the first reflection member is suitable for reflecting and turning a light entering the second light transmission channel into the first light transmission channel

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentEP4471190B1Single crystal growth device
Publication Date: 2026.02.18 ZHONGHUAN ADVANCED SEMICONDUCTOR TECHNOLOGY CO LTD
  • EP4471190B1 patent drawingFigure 1
  • EP4471190B1 patent drawingFigure 2
  • EP4471190B1 patent drawingFigure 3

AI summary

A single crystal growth device (100) includes: a furnace body (1), a crucible (2), a guide cylinder (3), a reflection module and an image receiving module (6), a first light transmission channel (31) and a second light transmission channel (32) are formed in the guide cylinder (3), an area, opposite to a light inlet hole (34) communicating with the second light transmission channel (32), of a junction position of an inner peripheral wall of the crucible (2) and a melt (21) is a detection area, the reflection module includes a first reflection member (51), the first reflection member (51) is disposed at a communication position of the first light transmission channel (31) and the second light transmission channel (32), and reflects and turns a light entering the second light transmission channel (32) into the first light transmission channel (31) and then into the image receiving module (6).