MEM Relay Matrix for ATE Calibration

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Solution Overview

Problem

Conventional calibration procedures for automated test equipment (ATE) are time-consuming due to serial, single-channel-at-a-time robotic probing, which will become even more significant with future generations of ATE having increased numbers of test channels.

Innovation Solution

A microelectromechanical (MEM)-based relay matrix assembly that eliminates the need for robotic probing by connecting multiple test channels simultaneously to a calibration instrument, allowing for high-density contact and mathematical correction of signal distortions introduced by the relay matrix.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If robotic probing is used for calibration, then measurement precision is maintained, but calibration time increases significantly

Engineering Contradiction:
Improvecalibration accuracyVSAvoidcalibration time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent replaces the mechanical robotic probing system with an electronic MEMS relay matrix system. Instead of physically moving a probe to each channel, the MEMS relays electronically switch connections between channels and the calibration instrument, eliminating mechanical motion while maintaining measurement capability through electrical switching.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent uses dynamically controllable MEMS relay switches that can rapidly change connection states between channels and the calibration instrument. This dynamic switching capability allows the system to quickly reconfigure which channel is being measured without physical movement, enabling fast sequential calibration of multiple channels.

Inventive Principle:
Principle #15Dynamics

2Productivity

If multiple channels are connected simultaneously, then calibration speed increases, but contact density requirements become more difficult to meet

Engineering Contradiction:
Improvecalibration speedVSAvoidcontact density
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent transitions from a one-dimensional linear arrangement of contacts to a two-dimensional array configuration. The MEMS relay matrix is organized with multiple rows and columns of contacts, allowing many channels to be connected simultaneously within a compact footprint by utilizing spatial arrangement in multiple dimensions rather than a single linear sequence.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent divides the large number of channel connections into multiple smaller contact arrays organized in a matrix structure. Instead of requiring one long linear sequence of contacts, the connection space is segmented into rows and columns, with each segment handling a subset of channels, thereby reducing the complexity any single contact region must manage.

Inventive Principle:
Principle #1Segmentation

3Loss of time

If relay matrix is used to increase channel connectivity, then calibration time decreases, but signal distortion is introduced

Engineering Contradiction:
Improvecalibration timeVSAvoidsignal fidelity
Core Design Contradiction:
Loss of timeVSLoss of information

Solution Approach 1:

The patent implements a feedback mechanism where the calibration instrument measures the actual signal characteristics through the MEMS relay matrix, detects any distortion or deviation from expected values, and uses this information to compute correction factors that are applied to subsequent measurements, thereby compensating for the relay matrix's signal effects.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent performs preliminary characterization of the MEMS relay matrix's signal properties during the calibration setup phase. By measuring and storing the relay matrix's transfer characteristics beforehand, the system can pre-compute correction algorithms that are then applied during actual channel calibration to remove the relay matrix's distorting effects from the measurements.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces calibration and verification times while maintaining accuracy, enabling faster calibration of ATE systems with increased channel counts.

Implementation Method 1

a first plurality of microelectromechanical (MEM) relay switches configured to connect or disconnect a first set of electrical paths between a selected one of the plurality of tester channels and the calibration instrument

Methodology Applied
Scientific EffectElectromagnetic actuation: Electromagnet

Data Source

PatentUS10048348B2MEM relay assembly for calibrating automated test equipment
Publication Date: 2018.08.14 TERADYNE INC
  • US10048348B2 patent drawing
  • US10048348B2 patent drawing
  • US10048348B2 patent drawing

AI summary

Apparatus and methods for calibrating tester channels of an automated test system. A relay matrix assembly including a plurality of microelectromechanical (MEM) switches may be used to connect a plurality of tester channels to an analyzer calibration instrument rapidly without requiring serial, robotic probing of the test channels. The relay matrix assembly may be constructed on a printed circuit board that can be attached to an interface on the tester. Calibration parameters for the test channels may be calculated from waveforms received through the relay matrix assembly and that have been corrected to remove waveform distortion introduced by the relay matrix assembly. Parameters to correct for distortion in the relay matrix assembly may be measured in advance and stored for use when calibration is to be performed.