Member Supplying Sheet for MEMS Pickup Efficiency
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Solution Overview
Problem
There is a demand for efficiently placing protective cover members over tiny product openings, such as MEMS, where existing methods struggle with shortening pickup time and improving placement efficiency due to the need for a larger pushup amount.
Innovation Solution
A member supplying sheet is developed, featuring a protective cover member with a laminate structure including a protective membrane and an adhesive layer, and a substrate sheet with specific tensile stress and peel force properties, allowing for effective pickup by a pushup-pickup device even with a small pushup amount.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the pushup amount of the substrate sheet is increased to improve pickup performance, then the pickup performance is improved, but the pickup time increases and placement efficiency decreases
Solution Approach 1:
The invention changes the physical parameters of the substrate sheet by controlling its tensile stress (15 N/5 mm or less at 10% stretching) and surface peel force (0.4 N/50 mm or less). These parameter changes enable the substrate sheet to achieve sufficient peeling performance with a smaller pushup amount, thereby improving pickup speed and placement efficiency without sacrificing pickup reliability
Solution Approach 2:
The invention introduces a porous layer in the substrate sheet that facilitates air permeation during the pushup process. This porous structure enables the substrate sheet to deform and peel more easily under small pushup forces, allowing for faster pickup operations while maintaining adequate peeling performance
2Productivity
If the pushup amount is decreased to shorten pickup time, then the pickup time is reduced, but the pickup performance deteriorates
Solution Approach 1:
The invention optimizes the substrate sheet parameters (tensile stress ≤15 N/5 mm at 10% stretching, peel force ≤0.4 N/50 mm) to achieve an optimal balance where sufficient pickup performance is maintained even with reduced pushup amounts, enabling faster pickup operations
Solution Approach 2:
The substrate sheet is constructed as a composite material including a base layer and a porous layer with specific mechanical and surface properties. This composite structure provides both the necessary deformability for easy peeling and the controlled surface characteristics for reliable protective cover member release
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The member supplying sheet ensures secure partial peeling and smooth peeling of the protective cover member, maintaining high pickup performance even with reduced pushup amounts, thus enhancing placement efficiency.
Implementation Method 1
the protective cover member is placed on the surface of the substrate sheet via the adhesive layer
Data Source
AI summary
A member supplying sheet provided includes: a protective cover member configured to be placed on a face of an object to prevent a foreign matter from entering an opening of the face; and a substrate sheet having a surface where the protective cover member is placed. The protective cover member includes a laminate including: a protective membrane having a shape configured to cover the opening when the protective cover member is placed on the face; and an adhesive layer. The protective cover member is placed on the surface of the substrate sheet via the adhesive layer. The member supplying sheet is suitable for supplying the protective cover member to a device that picks up the protective cover member in a state where the substrate sheet is pushed up from a back side of the substrate sheet, the back side being opposite to the surface.