Membrane Gas Sensor Flat Section for Uniform Heating

The patent introduces an insulating film with high thermal conductivity as an intermediary layer between the heater wire and the membrane. This mediator efficiently transmits heat from the heater to the detection electrode area, resolving the heat transmission difficulty while maintaining the peripheral heater configuration.

The patent changes the thermal conductivity parameter of the intermediate layer by selecting materials with high thermal conductivity for the insulating film. This parameter change enables effective heat transmission from the peripheral heater to the central detection area, achieving uniform temperature distribution.

The patent uses a planarizing insulating film as an intermediary layer between the heater wire and detection electrode. This mediator absorbs and compensates for the surface unevenness caused by the heater wire pattern, providing a flat substrate for the detection electrode and eliminating shape distortions.

The patent performs planarization of the heater wire surface before forming the detection electrode. By preliminarily creating a flat surface with the insulating film, the subsequent detection electrode can be formed with precise shape and dimensions, avoiding distortions that would destabilize the detection signal.

The patent uses a simple insulating film material that can be deposited in a single process step to achieve planarization, replacing complex and time-consuming CMP processes. This disposable-like approach uses a straightforward material layer to solve the flatness problem without adding significant process complexity or time.

The patent replaces mechanical planarization methods (such as CMP) with a film deposition process. By using thermal or chemical vapor deposition to form the insulating film, the patent achieves surface planarization through a simpler, faster process that eliminates the need for mechanical polishing operations.