Membrane Light Emitter with Vacuum Cavity for Reduced Heat Conduction

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Solution Overview

Problem

Light emitter devices face challenges in reducing power consumption due to heat conduction losses, which are not effectively addressed by existing technologies.

Innovation Solution

The design incorporates a heater structure on a membrane structure above a cavity with a lid substrate forming a second cavity under low pressure, reducing heat conduction and power consumption by minimizing gas pressure between the membrane and the lid substrate, and integrating an optical filter and reflective layers to control light emission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If a heater structure is used to emit light, then light emission function is achieved, but power consumption increases due to heat conduction losses

Engineering Contradiction:

Improvepower consumptionVSAvoidheat conduction losses

Core Design Contradiction:

Use of energy by moving objectVSLoss of energy

Solution Approach 1:

The patent applies vacuum (an inert environment with no gas molecules) in the cavity between the heater structure and supporting substrate. This eliminates heat conduction losses through the cavity, as vacuum cannot conduct heat. The heater structure is positioned above the supporting substrate with a cavity filled with vacuum or gas at reduced pressure, preventing thermal energy from conducting away from the heater, thereby reducing power consumption while maintaining light emission functionality.

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

2Loss of energy

If the cavity pressure is reduced to minimize heat conduction, then power consumption decreases, but manufacturing complexity increases

Engineering Contradiction:

Improveheat conductionVSAvoidmanufacturing process

Core Design Contradiction:

Loss of energyVSDevice complexity

Solution Approach 1:

The device is segmented into distinct functional layers: a supporting substrate, a heater structure, and a cavity space. This segmentation allows the cavity to be independently controlled and filled with vacuum or low-pressure gas, isolating the thermal management function from the structural support function. The heater structure is also segmented from the substrate by the cavity, enabling independent optimization of each component.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent changes the physical parameter of the cavity from atmospheric pressure to vacuum or reduced pressure state. This parameter change fundamentally alters the heat transfer mechanism, eliminating conduction and convection, leaving only radiation. The cavity pressure is specifically controlled to be less than atmospheric pressure, optimizing thermal insulation while maintaining structural integrity.

Inventive Principle:

Principle #35Parameter changes

3Strength

If the heater structure is positioned close to the substrate for structural stability, then mechanical strength increases, but heat conduction losses increase

Engineering Contradiction:

Improvestructural stabilityVSAvoidheat conduction

Core Design Contradiction:

StrengthVSLoss of energy

Solution Approach 1:

The vacuum cavity acts as an intermediary layer between the heater structure and the supporting substrate. This intermediary space physically separates the two components, preventing direct thermal contact and eliminating heat conduction through the substrate. The cavity maintains structural stability while serving as a thermal barrier, allowing the heater to be positioned close enough for mechanical support but far enough to prevent heat loss.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces power consumption by minimizing heat conduction and allows for efficient light emission with reduced system size and manufacturing costs, making it suitable for applications like photoacoustic gas sensors.

Implementation Method 1

The heater structure is configured to emit light, if a predefined current flows through the heater structure

Methodology Applied

Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 2

A pressure in the second cavity is less than 100 mbar

Methodology Applied

Scientific EffectHeat conduction reduction through vacuum/low pressure: Vacuum

Data Source

PatentUS10955599B2Light emitter devices, photoacoustic gas sensors and methods for forming light emitter devices

Publication Date: 2021.03.23 INFINEON TECHNOLOGIES AG

AI summary

A light emitter device includes an emitter component including a heater structure arranged on a membrane structure. The membrane structure is located above a first cavity. Additionally, the first cavity is located between the membrane structure and at least a portion of a supporting substrate of the emitter component. Further, the heater structure is configured to emit light, if a predefined current flows through the heater structure. Additionally, the light emitter device includes a lid substrate having a recess. The lid substrate is attached to the emitter component so that the recess forms a second cavity between the membrane structure and the lid substrate. Further, a pressure in the second cavity is less than 100 mbar.