Deformable Membrane Actuation Using Micro-Beam Actuators
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Solution Overview
Problem
Existing optical devices with deformable membranes, such as liquid lenses and mirrors, face challenges including complex and bulky actuating mechanisms, high cost, optical aberrations, and incompatibility with micro-electronic manufacturing methods, making them unsuitable for miniature cameras and other compact applications.
Innovation Solution
The use of micro-beam type thermal or piezoelectric actuators distributed around the periphery of the membrane, which are secured to a support and move to deform the membrane, reducing the size and complexity of the actuating means while ensuring parallelism and minimizing the risk of leakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional actuating means are used to deform the membrane, then the membrane can be actuated, but the actuating mechanism becomes complex and bulky
Solution Approach 1:
The actuating mechanism is segmented into multiple independent micro-beam actuators distributed around the periphery of the membrane, each capable of independent deformation. This segmentation allows the complex actuation function to be achieved through simple, identical units rather than a single complex mechanism.
Solution Approach 2:
The conventional mechanical actuating means are replaced with micro-beam type actuators that utilize piezoelectric or thermal effects to directly deform the membrane. This substitution eliminates complex mechanical linkages and reduces the overall device complexity while maintaining actuation functionality.
2Ease of operation
If conventional actuating means are used, then the membrane can be deformed, but the device size increases
Solution Approach 1:
The membrane itself is designed as a flexible thin film structure that can be directly deformed by the micro-beam actuators. The flexibility of the thin film allows for effective membrane deformation without requiring bulky mechanical structures, thereby reducing the overall device volume.
Solution Approach 2:
By replacing conventional mechanical actuation systems with piezoelectric or thermal micro-beam actuators, the device volume is significantly reduced. These actuators directly convert electrical or thermal energy into mechanical deformation of the membrane, eliminating the need for intermediate mechanical components that would increase device size.
3Ease of operation
If complex mechanical structures are used for actuation, then the membrane can be controlled, but the manufacturing cost increases
Solution Approach 1:
The membrane control function is divided into multiple identical micro-beam actuator units that can be manufactured using standardized processes. This segmentation enables batch production of identical components, significantly reducing manufacturing costs compared to producing a single complex actuating mechanism.
Solution Approach 2:
The replacement of complex mechanical structures with micro-beam actuators based on piezoelectric or thermal effects enables integration with semiconductor manufacturing processes. This allows for cost-effective batch production using established industrial techniques, significantly reducing manufacturing costs while maintaining precise membrane control.
4Ease of operation
If conventional actuating means are used, then the membrane can be deformed, but optical aberrations occur
Solution Approach 1:
The micro-beam actuators are strategically positioned and sized to create localized deformation zones on the membrane. This local quality approach allows precise control of membrane shape changes, ensuring that deformation occurs only where needed while maintaining optical quality in the rest of the membrane structure.
Solution Approach 2:
The use of piezoelectric or thermal micro-beam actuators enables more precise and controlled membrane deformation compared to conventional mechanical systems. The direct conversion of electrical/thermal energy to mechanical deformation allows for finer control of membrane shape, reducing optical aberrations and improving overall optical quality.
5Ease of operation
If conventional actuating means are used, then the membrane can be deformed, but the device is not compatible with micro-electronic manufacturing
Solution Approach 1:
The replacement of conventional mechanical actuating means with micro-beam type actuators based on piezoelectric or thermal effects enables the device to be manufactured using standard semiconductor and micro-electronic fabrication processes. This substitution is crucial for compatibility with existing micro-electronic manufacturing infrastructure, allowing for scalable production.
Solution Approach 2:
The segmentation of the actuating system into multiple identical micro-beam units facilitates integration with micro-electronic manufacturing processes. These standardized units can be fabricated using the same techniques used for producing micro-electronic components, enabling co-manufacturing and leveraging the existing expertise and infrastructure in the micro-electronic industry.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables the creation of compact, cost-effective optical devices with reduced optical aberrations, compatible with micro-electronic manufacturing techniques, and improved reliability for applications like miniature cameras.
Implementation Method 1
actuating means are formed of several thermal or piezoelectric actuators of the micro-beam type
Implementation Method 2
actuating means are formed of several thermal or piezoelectric actuators of the micro-beam type
Data Source
Figure 1A~1B
Figure 1C~1E
Figure 2A~2B
AI summary
This concerns an optical device with deformable membrane (2) comprising an anchoring area (2.3) on a support (1.5) helping to contain a constant volume of liquid (4) in contact with one of its faces, a substantially central area (2.1), able to be deformed reversibly from a rest position, actuation means (5) for displacing the liquid (4) in the central area (2.1), stressing the membrane in parts (200) situated between the central area (2.1) and the anchoring area (2.3). The actuation means (5) comprise several thermal or piezoelectric actuators (5.1) of micro-beam type, distributed at the periphery of the membrane, these micro-beams having at least one fixed part joined to the support and at least one moving part coming into contact, on an actuation, with the membrane in an area situated between the central area and the anchoring area.