Membrane Probe Card Support Structure for Uniform Contact Force
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Solution Overview
Problem
Membrane probe cards used in high-frequency electrical tests suffer from uneven contact force between probes and devices under test due to the flexible nature of membranes, leading to inconsistent flatness and unreliable test results.
Innovation Solution
A supporting structure with adjustable elastic structures and adjustment mechanisms is introduced between the substrate and membrane to ensure uniform contact stress and flatness, allowing for precise adjustment of elastic forces to maintain consistent contact strength across the test area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a membrane probe card is used for high-frequency electrical tests, then high-speed circuit testing capability is improved, but contact force uniformity between probes and device under test deteriorates
Solution Approach 1:
The supporting structure is divided into multiple independent elastic structures (springs) distributed across the membrane probe card. Each elastic structure can independently adjust and provide contact force to its corresponding probe area, allowing localized compensation for flatness variations while maintaining overall high-frequency testing capability
Solution Approach 2:
The elastic structures are designed with adjustable parameters (such as spring constant, pre-load force, and position) to optimize contact force distribution. By changing these parameters, the system achieves uniform contact force across different probe areas while preserving the membrane's flexibility for high-speed electrical tests
2Speed
If the membrane is made flexible for high-frequency testing, then testing speed is improved, but contact stress uniformity deteriorates
Solution Approach 1:
The elastic structures serve as intermediary elements between the rigid substrate and the flexible membrane probes. These intermediaries absorb and distribute mechanical stresses uniformly across the membrane, ensuring even contact stress distribution while allowing the membrane to maintain its flexible nature for high-speed testing
Solution Approach 2:
The supporting structure is designed to create equipotential contact conditions across all probe areas. By adjusting the elastic structures, the system ensures that all probes experience similar contact stress levels, eliminating variations in contact quality while preserving membrane flexibility
3Ease of manufacture
If the probe card structure is simplified, then manufacturing ease is improved, but contact force control precision deteriorates
Solution Approach 1:
The supporting structure incorporates adjustable elastic structures that can be dynamically tuned during manufacturing and operation. This dynamic adjustability allows for precise contact force control without requiring complex fixed mechanisms, maintaining manufacturing simplicity while achieving high precision in contact force distribution
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures equal strength of force contact between the membrane and the device under test, enhancing test reliability and preventing damage to both the probe card and the device.
Implementation Method 1
The first elastic structures are disposed in a first space of the frame body and correspond in position to the adjustment mechanisms, respectively. The adjustment mechanisms adjust elastic forces of the first elastic structures.
Data Source
AI summary
The present disclosure provides a supporting structure of a membrane probe card. The supporting structure includes a frame body, a fixture, adjustment mechanisms, and first elastic structures. The frame body is configured to be in contact with the membrane. The fixture is configured to fixate the frame body on the substrate, and confine the frame body to be movable along a direction perpendicular to the substrate. The fixture includes through holes. The adjustment mechanisms are movably and tightly disposed in the through holes, respectively. The first elastic structures are disposed in a first space of the frame body, and each of the first elastic structures corresponds in position to one adjustment mechanism. The adjustment mechanisms are configured to adjust elastic forces of the first elastic structures.