Membrane Probe Card Support Structure for Uniform Contact Force
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Solution Overview
Problem
Membrane probe cards used in high-frequency electrical tests suffer from uneven contact force between probes and devices under test due to the flexible nature of membranes, leading to inconsistent flatness and unreliable test results.
Innovation Solution
A supporting structure with adjustable elastic structures and adjustment mechanisms is introduced between the substrate and membrane to ensure uniform contact stress and flatness, allowing for precise adjustment of elastic forces to maintain consistent contact strength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If membrane probe cards are used for high-frequency electrical tests, then high-frequency testing capability is improved, but contact force uniformity deteriorates
Solution Approach 1:
A supporting structure is introduced as an intermediary component between the substrate and the membrane. This supporting structure includes adjustable elastic structures that mediate the force transmission, ensuring uniform contact force across the membrane while preserving the high-frequency testing capability of the membrane probe card
Solution Approach 2:
The elastic force parameters of the supporting structure are adjusted to optimize contact uniformity. By changing the elastic force parameters of the adjustable elastic structures, the system achieves uniform contact force distribution while maintaining the operational characteristics for high-frequency testing
2Measurement precision
If membrane flatness is adjusted to match DUT flatness, then test accuracy is improved, but structural complexity increases
Solution Approach 1:
The supporting structure incorporates adjustable elastic structures that can dynamically adapt to flatness variations. This dynamic adjustment capability allows the membrane flatness to match the DUT flatness for accurate testing, while the adjustability means the same structure can be reconfigured for different testing scenarios, effectively managing complexity
Solution Approach 2:
The supporting structure is pre-configured with adjustable elastic structures before testing begins. This preliminary setup allows for flatness matching to be achieved through adjustment rather than requiring complex structural modifications during testing, thereby improving test accuracy without proportionally increasing overall structural complexity
3Force
If adjustable elastic structures are added to ensure uniform contact force, then contact force uniformity is improved, but device complexity increases
Solution Approach 1:
The adjustable elastic structures provide dynamic force distribution capability. These structures can be adjusted to achieve uniform contact force, and their adjustability means they can adapt to different testing requirements, making the added complexity worthwhile while achieving the force uniformity goal
Solution Approach 2:
The supporting structure is divided into multiple adjustable elastic structures that can be independently adjusted. This segmentation allows for localized force adjustment across different regions of the membrane, achieving overall contact force uniformity through coordinated adjustment of individual segments, rather than requiring a completely complex monolithic structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures equal contact force and flatness between probes and devices under test, enhancing test precision and protecting both the probe card and device from damage.
Implementation Method 1
a first elastic structure (130) disposed in a first space of the frame body and corresponding in position to the adjustment mechanisms, respectively
Implementation Method 2
The adjustment mechanisms adjust elastic forces of the first elastic structures
Data Source
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AI summary
The present disclosure provides a supporting structure of a membrane probe card. The supporting structure includes a frame body, a fixture, adjustment mechanisms, and first elastic structures. The frame body is configured to be in contact with the membrane. The fixture is configured to fixate the frame body on the substrate, and confine the frame body to be movable along a direction perpendicular to the substrate. The fixture includes through holes. The adjustment mechanisms are movably and tightly disposed in the through holes, respectively. The first elastic structures are disposed in a first space of the frame body, and each of the first elastic structures corresponds in position to one adjustment mechanism. The adjustment mechanisms are configured to adjust elastic forces of the first elastic structures.