Membrane Purge Diffuser for Uniform Substrate Container Purging
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Solution Overview
Problem
Current substrate container purging methods face challenges in evenly distributing purge gas and effectively removing contaminants while controlling relative humidity and oxygen levels, leading to potential cross-contamination and inefficiencies.
Innovation Solution
The introduction of a purge diffuser system comprising a core with internal channels and diffuser ports, combined with filter media, which is secured to the outer surface and designed to distribute purge gas efficiently and filter out contaminants, ensuring high flow rates without losing static seal integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If purge gas is injected through inlet ports to displace ambient air, then oxygen levels decrease, but particulate contaminants become trapped in filtering mechanisms causing cross-contamination
Solution Approach 1:
The patent employs a porous membrane as a diffuser that allows gas to pass through while filtering particulate contaminants. The porous structure enables simultaneous oxygen reduction and particulate removal, resolving the contradiction between purging effectiveness and contamination prevention.
Solution Approach 2:
The porous membrane acts as an intermediary between the purge gas source and the container interior. It mediates the purging process by allowing gas flow while blocking contaminants, preventing cross-contamination that would otherwise occur with direct injection through filtering mechanisms.
2Productivity
If high flow rates of purge gas are used to quickly purge the container, then purging speed increases, but static seal interface integrity is compromised
Solution Approach 1:
The porous membrane enables high flow rates while maintaining pressure distribution that preserves static seal integrity. The distributed porosity allows gas to pass through at high rates without creating localized pressure spikes that would compromise seals.
Solution Approach 2:
The patent changes the physical parameter of gas delivery by using a porous structure instead of concentrated ports. This distributes the pressure field, allowing high flow rates while maintaining the pressure conditions necessary for static seal integrity.
3Ease of operation
If conventional purge ports are used to facilitate gas introduction and exhaustion, then gas flow is enabled, but even distribution of purge gas over substrates is not achieved
Solution Approach 1:
The patent segments the gas delivery system into numerous small porous elements distributed across the diffuser surface. This segmentation creates multiple gas introduction points that distribute purge gas evenly over the substrates, eliminating the non-uniform distribution from conventional single-port systems.
Solution Approach 2:
The porous membrane provides inherent even distribution through its distributed pore structure. Gas flows uniformly through the porous material, creating consistent gas flow patterns across the entire substrate area, achieving manufacturing precision in purge distribution.
4Object-affected harmful factors
If filtering mechanisms are used to remove airborne contaminants, then contaminant removal is achieved, but the filtering mechanisms themselves become contaminated requiring additional cleaning
Solution Approach 1:
The porous membrane serves as an intermediary that filters contaminants while allowing gas flow. Its unique porous structure enables it to trap contaminants on its surface without becoming clogged in the same way conventional filters, reducing maintenance requirements.
Solution Approach 2:
The porous material's structure allows contaminants to be captured on the surface while maintaining open pathways for gas flow. This prevents the clogging and cross-contamination issues that plague conventional filtering mechanisms, easing maintenance requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution minimizes particulate contamination, achieves greater than 99% particle filtration efficiency, and maintains control over relative humidity and oxygen concentrations within the substrate container, enhancing the cleanliness and efficiency of the purging process.
Implementation Method 1
a porous hydrophobic membrane, such as, but not limited to, a polyolefin, polyester, polysulfone, or fluoropolymer membrane
Implementation Method 2
a porous hydrophobic membrane
Data Source
AI summary
Purge diffusers for use in systems for transporting substrates include: i) a purge diffuser core having an internal purge gas channel, one or more diffuser ports and an outer surface; ii) filter media secured to the outer surface of the purge diffuser core; and iii) a purge port connector for mounting the purge diffuser to a purge port of a substrate container for transporting substrates. The purge diffuser core may be a unitary article, may be formed by injection molding, and may include diverters internal to the internal purge gas channel.