Membrane Gas Separation for Concentrated Reagent Gas Delivery
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Solution Overview
Problem
The presence of a stabilizing gas in reagent gas mixtures reduces the utility and value of the reagent gas, leading to reduced concentration and non-uniformity during storage and delivery, which affects the efficiency and quality of processes like chemical vapor deposition and ion implantation, and can result in unpredictable performance impacts.
Innovation Solution
A separation membrane is used to allow preferential flow of the diluent gas relative to the reagent gas, increasing the concentration of the reagent gas by removing the diluent gas from the mixture.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If reagent gas is stored and transported diluted with stabilizing gas to reduce safety risks, then safety is improved, but the concentration and utility of the reagent gas deteriorates
Solution Approach 1:
The system separates the storage function (diluted mixture for safety) from the delivery function (concentrated reagent gas for utility) by using a membrane device at the point of use to concentrate the reagent gas from the diluted mixture, thus segmenting the contradiction between safe storage and effective delivery
Solution Approach 2:
A membrane device acts as an intermediary between the diluted reagent gas mixture and the process equipment, selectively removing the stabilizing gas to produce concentrated reagent gas, thereby mediating the contradiction between safety requirements and process requirements
2Stability of the object's composition
If diluent gas is present in stored gas mixture to ensure safety, then stability is improved, but the utility and value of reagent gas deteriorates
Solution Approach 1:
The system performs preliminary separation of the diluent gas from the reagent gas using a membrane device before delivery to the process equipment, thereby preparing the concentrated reagent gas in advance to maximize utility while maintaining stability during storage
Solution Approach 2:
The membrane device extracts the stabilizing gas from the diluted reagent gas mixture, removing the component that provides stability during storage but reduces utility during processing, thereby delivering concentrated reagent gas with maximum productivity
3Reliability
If reagent gas is delivered diluted to maintain safety during storage, then safety is improved, but process efficiency and quality deteriorate
Solution Approach 1:
The system segments the gas delivery process into two stages: safe storage of diluted mixture and concentrated delivery of reagent gas through membrane separation, ensuring both safety during storage and quality during manufacturing
Solution Approach 2:
The membrane device serves as an intermediary that transforms the diluted safe storage form into concentrated high-quality delivery form, maintaining safety while improving manufacturing precision and process quality
4Reliability
If stabilizing gas is used to prevent deflagration, then reliability is improved, but uniformity and consistency of reagent gas deteriorates
Solution Approach 1:
The membrane device extracts the stabilizing gas from the mixture, removing the source of non-uniformity and composition variability, thereby delivering consistent and uniform concentrated reagent gas while maintaining reliability through safe diluted storage
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method produces a concentrated reagent gas with improved uniformity and consistency, enhancing process control and quality in semiconductor and microelectronic device manufacturing by ensuring higher reagent gas concentrations, thus improving yield and reducing downtime.
Implementation Method 1
contacting the stored gas mixture with a separation membrane that allows preferential flow of the diluent gas through the separation membrane relative to the reagent gas
Data Source
AI summary
Described are methods, systems, and apparatus for processing a gas mixture that contains at least two gases by contacting the gas mixture with a membrane that allows for preferential flow of one of the gases through the membrane, to separate one constituent gas from the mixture.