Membrane Sensor Gel Weight Compensation
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Solution Overview
Problem
Micromechanical membrane sensors, particularly pressure sensors, face inaccuracies due to the additional weight force from protective gels, leading to orientation-dependent g-sensitivity and acceleration sensitivity in measured values.
Innovation Solution
Incorporating a second sensor element with a spring-mass system that detects the weight force or acceleration, allowing for compensation of these effects in determining the sensor value, thereby reducing interference from the gel coating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a protective gel is coated on the membrane surface, then the membrane is protected from corrosion and deposition, but the additional weight force causes orientation-dependent g-sensitivity and acceleration sensitivity in the measured values
Solution Approach 1:
The sensor system is segmented into two independent sensor elements: the first sensor element detects the primary sensor variable (e.g., pressure), while the second sensor element specifically detects the acceleration/weight force component. This segmentation allows the harmful acceleration sensitivity to be separately measured and compensated, resolving the contradiction between maintaining gel protection and ensuring measurement accuracy.
Solution Approach 2:
The second sensor element provides feedback information about the acceleration/weight force acting on the membrane. This feedback is used to computationally compensate for the g-sensitivity in the measured values from the first sensor element, thereby eliminating the measurement errors caused by the protective gel's additional weight while preserving the protection benefits.
2Measurement precision
If computational compensation for g-sensitivity is implemented using a separate acceleration sensor, then measurement accuracy is improved, but additional computing capacity and energy expenditure are required
Solution Approach 1:
The compensation function is merged with the primary sensing function by integrating the second sensor element directly into the membrane sensor structure. Both sensor elements share the same membrane and evaluation unit, allowing the compensation calculation to be performed using the existing sensor infrastructure without requiring separate acceleration sensor hardware or additional external computing resources.
Solution Approach 2:
The evaluation unit is designed with multi-functionality, serving both to evaluate the primary sensor variable from the first sensor element and to perform the compensation calculation using data from the second sensor element. This universal approach allows a single evaluation unit to handle both measurement and compensation tasks, reducing the need for additional dedicated computing resources and minimizing energy expenditure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach compensates for the interference caused by the gel coating without additional computing effort, improving the accuracy of sensor values and reducing energy expenditure.
Implementation Method 1
the second sensor element has a spring-mass system in which at least one first mass is connected to at least one spring element
Implementation Method 2
the second sensor variable corresponds to the acceleration due to gravity or the gravitational force of the total mass of the membrane and an additional covering
Implementation Method 3
the first mass can have a movable electrode which is part of a second capacitive measured value detection means for detecting a compensation variable
Data Source
AI summary
A micromechanical membrane sensor, and a method which is suitable for determining a sensor value and/or a sensor variable of the membrane sensor. The sensor value of the membrane sensor is determined such that the weight force or another acceleration onto the membrane is largely compensated.