3D Memory Structure Bit Line Density Optimization
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Solution Overview
Problem
High bit line density in memory devices leads to increased capacitance and resistance, causing RC delay and higher power consumption, while also increasing litho-etch process costs.
Innovation Solution
A memory structure with N array regions and N page buffers, where conductive lines have a pitch to lateral distance ratio of 1/5 to 1/2, and M array regions operate simultaneously, reducing the number of connections and capacitance, and using a multi-plane design to decrease resistance and power consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If bit line density is increased to improve memory speed and parallel operation, then memory speed and parallel operation capability are improved, but capacitance increases causing higher RC delay and power consumption
Solution Approach 1:
The memory array is divided into multiple independent planes (first memory plane, second memory plane, etc.), each with its own set of bit lines. This segmentation allows selective activation of only the required plane for each operation, reducing the number of simultaneously active bit lines and thereby reducing total capacitance and power consumption while maintaining high-speed access capability.
Solution Approach 2:
The patent transitions from a two-dimensional memory layout to a three-dimensional stacked architecture with multiple memory planes arranged vertically. This dimensional change allows increased storage density without proportionally increasing bit line density in the horizontal plane, as multiple planes share the same bit line infrastructure through vertical stacking.
2Productivity
If bit line density is increased to improve memory speed, then parallel operation capability is improved, but resistance increases causing higher RC delay
Solution Approach 1:
By segmenting the memory into multiple planes with independent bit line sets, the patent enables parallel operations across planes while keeping the bit line length and density within each plane manageable. This reduces the resistance component of RC delay compared to a single high-density plane design.
Solution Approach 2:
The vertical stacking of multiple memory planes allows parallel operations to be achieved through plane selection rather than solely through increased horizontal bit line density. This dimensional approach reduces bit line length and resistance while maintaining parallel operation capability.
3Speed
If bit line density is increased to improve memory speed, then capacitance increases causing higher power consumption, but memory speed needs to be maintained
Solution Approach 1:
The memory structure is divided into multiple planes where only one plane is actively accessed at a time. This segmentation reduces the total capacitance that must be charged and discharged during each operation, as only the bit lines for the active plane are switched, thereby reducing power consumption while maintaining high-speed access.
Solution Approach 2:
Each memory plane is designed with optimized local bit line density appropriate for its function, rather than uniformly high density throughout. The multi-plane structure allows each plane to have controlled capacitance characteristics tailored to performance requirements.
Data Source
AI summary
A memory structure includes N array regions and N page buffers coupled to the N array regions, respectively. N is an integer≧2. Each of the N array regions includes a 3D array of a plurality of memory cells. The memory cells have a lateral distance d between two adjacent memory cells on a horizontal cell plane of the 3D array. Each of the N array regions further includes a plurality of conductive lines. The conductive lines are disposed over and coupled to the 3D array. The conductive lines have a pitch p, and p/d=⅕ to ½. The N array regions and the N page buffers are arranged on one line along an extension direction of the conductive lines. M array regions of the N array regions are configured to operate simultaneously. M is an integer. M/N=½ or 1.


