Memory Block Dielectric Separation to Reduce Block-Bending Errors

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Solution Overview

Problem

Conventional memory device fabrication processes are prone to block-bending errors, leading to poor electrical connections and potential failures due to instability in the structure of memory blocks.

Innovation Solution

Incorporating different dielectric structures between memory blocks to stabilize the block structure and mitigate block-bending errors, thereby enhancing memory cell density and reducing the occurrence of electrical connection failures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional fabrication processes are used to form memory blocks, then manufacturing simplicity is maintained, but block-bending errors occur leading to poor electrical connections and potential failures

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoiddielectric structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent divides the memory device into multiple blocks separated by dielectric structures. Each block is formed as a distinct unit with its own set of memory cells, allowing independent stabilization. The dielectric structures act as separators that prevent bending errors from propagating between blocks, thereby improving electrical connection reliability without requiring complete redesign of the entire memory array.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Dielectric structures are introduced as intermediary elements between adjacent memory blocks. These dielectric structures serve as mediators that physically separate and stabilize the blocks, preventing direct contact that could lead to bending errors. The dielectric material properties (such as rigidity and thermal expansion characteristics) are specifically chosen to mitigate block-bending errors while maintaining electrical isolation between blocks.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Stability of the object's composition

If dielectric structures are added between memory blocks to stabilize structure, then block-bending errors are reduced, but manufacturing complexity increases

Engineering Contradiction:
Improveblock structure stabilityVSAvoidfabrication process simplicity
Core Design Contradiction:
Stability of the object's compositionVSEase of manufacture

Solution Approach 1:

The dielectric structures are formed between memory blocks during the fabrication process at predetermined stages, before final assembly and testing. This preliminary formation of dielectric separators ensures that blocks are stabilized early in the manufacturing process, preventing bending errors from developing during subsequent processing steps. The dielectric material is deposited and patterned in advance, establishing structural stability before additional layers are added.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent utilizes changes in material parameters, specifically introducing dielectric materials with appropriate mechanical and electrical properties between blocks. The dielectric constant, thickness, and composition of these structures are optimized to provide sufficient mechanical support for block stabilization while maintaining electrical isolation. By carefully selecting and controlling these parameters, the patent achieves block stability without requiring excessive manufacturing complexity.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If more dielectric structures are implemented between blocks, then block-bending errors are further reduced, but memory cell density may be affected

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidmemory cell density
Core Design Contradiction:
ReliabilityVSQuantity of substance

Solution Approach 1:

Rather than placing dielectric structures at every possible location between all blocks, the patent implements dielectric separators at critical positions where bending errors are most likely to occur. This partial action approach provides sufficient stabilization to prevent the majority of block-bending errors while minimizing the space consumed by dielectric structures. The selective placement of dielectric structures optimizes the balance between reliability improvement and memory cell density maintenance.

Inventive Principle:
Principle #16Partial or excessive action

Data Source

PatentUS12185549B2Memory device including different dielectric structures between blocks
Publication Date: 2024.12.31 MICRON TECHNOLOGY INC
  • US12185549B2 patent drawing
  • US12185549B2 patent drawing
  • US12185549B2 patent drawing

AI summary

Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes levels of conductive materials interleaved with levels of dielectric materials; memory cell strings including respective pillars extending through the levels of conductive materials and the levels of dielectric materials; a first dielectric structure formed in a first slit through the levels of conductive materials and the levels of dielectric materials; a second dielectric structure formed in a second slit through the levels of conductive materials and the levels of dielectric materials; the first dielectric structure and the second dielectric structure separating the levels of conductive materials, the levels of dielectric materials, and the pillars into separate portions, and the first and second dielectric structures including different widths.