Stacked Memory Cube Thermal Layer for Heat Dissipation

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Solution Overview

Problem

As semiconductor devices downscale and operate at higher speeds, thermal dissipation becomes a critical issue affecting their performance, with existing technologies struggling to effectively manage heat in highly integrated semiconductor packaging.

Innovation Solution

The implementation of a memory device manufacturing method involving a thermally conductive layer with anisotropic thermal conductivity, integrated into a frame-shaped configuration within the packaging unit, which provides lateral thermal paths while maintaining electrical isolation from semiconductor dies, enhancing heat dissipation efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If semiconductor devices are downscaled and operated at higher speeds, then operation speed and integration density are improved, but thermal dissipation capability deteriorates

Engineering Contradiction:
Improveoperation speedVSAvoidthermal dissipation
Core Design Contradiction:
SpeedVSTemperature

Solution Approach 1:

The patent introduces a frame-shaped thermally conductive layer configured in a rectangular pattern with openings, transitioning from conventional point-source or linear heat sinks to a two-dimensional distributed thermal management structure. This dimensional expansion provides multiple lateral thermal pathways throughout the packaging unit, significantly improving heat dissipation capability while maintaining compatibility with downscaled high-speed device operations

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If highly integrated semiconductor packaging is implemented, then device integration density is improved, but thermal management capability deteriorates

Engineering Contradiction:
Improveintegration densityVSAvoidheat dissipation
Core Design Contradiction:
ProductivityVSTemperature

Solution Approach 1:

The thermally conductive layer is segmented into a frame-shaped structure with multiple openings, creating distributed thermal management zones throughout the packaging unit. This segmentation allows heat to be dissipated through multiple discrete pathways rather than relying on a single centralized heat sink, effectively managing thermal loads in highly integrated packaging configurations

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements a two-dimensional frame-shaped thermally conductive layer that spans across the packaging unit, providing lateral thermal pathways in the planar dimension. This dimensional approach complements vertical heat dissipation routes, creating a three-dimensional thermal management network that scales effectively with increased integration density

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Temperature

If thermally conductive materials are added to improve heat dissipation, then thermal management is improved, but electrical isolation requirements create design complexity

Engineering Contradiction:
Improveheat dissipation efficiencyVSAvoidelectrical isolation design
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent introduces a dielectric layer positioned between the frame-shaped thermally conductive layer and the semiconductor die, serving as an intermediary that simultaneously provides electrical isolation and thermal coupling. This dielectric mediator allows the thermally conductive layer to be electrically isolated from the die while maintaining thermal contact through the encapsulant, resolving the conflict between electrical isolation and thermal management requirements

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly improves heat dissipation efficiency by at least 50%, reducing operation temperatures and protecting semiconductor dies from heat damage, thereby enhancing the reliability and performance of memory devices.

Implementation Method 1

a thermally conductive layer (446) in the fourth tier (10D), wherein the thermally conductive layer (446) is configured to provide thermal paths laterally in the packaging unit (PU)

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20240387454A1Memory device and manufacturing method thereof
Publication Date: 2024.11.21 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20240387454A1 patent drawing
  • US20240387454A1 patent drawing
  • US20240387454A1 patent drawing

AI summary

A memory device including a first semiconductor die and a memory cube mounted on and connected with the first semiconductor die is described. The memory cube includes multiple stacked tiers, and each tier of the multiple stacked tiers includes second semiconductor dies laterally wrapped by an encapsulant and a redistribution structure disposed on the second semiconductor dies and the encapsulant. The second semiconductor dies of the multiple stacked tiers are electrically connected with the first semiconductor die through the redistribution structures in the multiple stacked tiers. Each redistribution structure in the multiple stacked tiers includes redistribution patterns, the redistribution structure closest to the first semiconductor die further includes a thermally conductive layer connected to the first semiconductor die, wherein a material of the redistribution patterns in the multiple stacked tiers is different from a material of the thermally conductive layer of the redistribution structure closest to the first semiconductor die, and the thermally conductive layer is electrically isolated from the second semiconductor dies in the multiple stacked tiers and the first semiconductor die.