Nonvolatile Memory Cell With Diode Steering Element

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Solution Overview

Problem

Existing nonvolatile memory devices face challenges in creating erasable or multi-state memory cells using conventional semiconductor materials, as they are difficult to scale to small sizes and operate efficiently, especially with complex structures like floating gate and SONOS cells, and exotic materials like chalcogenides present production challenges.

Innovation Solution

A nonvolatile memory device is formed using a semiconductor diode steering element and a semiconductor resistor read/write switching element, arranged in series with conductive layers, allowing for two or more stable resistivity states to be achieved through appropriate electrical pulses, reducing leakage current and enabling dense cross-point memory arrays.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If floating gate and SONOS memory cells are used to achieve erasable or multi-state cells, then data storage capability is improved, but device complexity and fabrication difficulty increase

Engineering Contradiction:
Improveerasable or multi-state memory capabilityVSAvoidfabrication complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The memory cell is divided into two separate terminals: a first terminal for programming/erasing operations and a second terminal for read operations. This segmentation allows independent optimization of programming and read functions, simplifying the overall device structure while maintaining erasable and multi-state capabilities without requiring complex floating gate or SONOS structures

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent extracts the complex charge storage mechanisms from floating gate and SONOS structures and replaces them with a simpler resistive switching element. This extraction eliminates the need for complex multi-layer gate structures while preserving the essential functionality of erasable and multi-state memory operation

Inventive Principle:
Principle #2Taking out (Extraction)

2Adaptability or versatility

If chalcogenide materials are used to achieve resistivity changes for data storage, then data state capability is improved, but manufacturing difficulty increases

Engineering Contradiction:
Improveresistivity state switching capabilityVSAvoidmanufacturing ease
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent uses conventional semiconductor materials and changes their resistivity parameter through electrical field-induced phase transitions in the resistive switching element. This approach achieves multiple stable resistivity states using standard semiconductor fabrication processes, avoiding the need to work with difficult-to-process chalcogenide materials while maintaining the desired multi-state capability

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces expensive and difficult-to-manufacture chalcogenide materials with conventional, inexpensive semiconductor materials that can be processed using standard fabrication techniques. This substitution maintains the functional capability of resistivity switching while dramatically improving manufacturability and compatibility with existing production facilities

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Productivity

If memory cells are scaled to small dimensions for competitiveness, then integration density is improved, but leakage current increases

Engineering Contradiction:
Improveintegration densityVSAvoidleakage current
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The memory cell is segmented into separate programming and read terminals, allowing the read operation to be performed at low voltages that do not induce leakage. The programming terminal handles high-voltage operations independently, preventing leakage current from affecting the read functionality and enabling safe scaling to small dimensions

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a diode element as an intermediary between the programming and read functions. This diode acts as a steering element that directs current flow during programming operations while blocking leakage paths during read operations, enabling the memory cell to be scaled down without suffering from increased leakage current

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for the creation of memory cells with reduced leakage current, enabling efficient data storage in a highly dense array, with the ability to switch between multiple data states, making the memory cells either one-time-programmable or rewriteable, using conventional semiconductor materials.

Implementation Method 1

a read/write switching element, which in this example is a semiconductor resistor, capable of achieving two or more stable resistivity states through appropriate electrical pulses

Methodology Applied
Scientific EffectElectrical resistivity: Electrical Resistance

Data Source

PatentUS7800939B2Method of making 3D R/W cell with reduced reverse leakage
Publication Date: 2010.09.21 SANDISK TECHNOLOGIES LLC
  • US7800939B2 patent drawing
  • US7800939B2 patent drawing
  • US7800939B2 patent drawing

AI summary

A method of making a nonvolatile memory device includes forming a semiconductor diode steering element, and forming a semiconductor read/write switching element.