Memory Gate Landing Pad Bridge for Split-Gate Integration
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Solution Overview
Problem
Integrating split-gate memory cells with other field-effect devices on the same substrate is challenging due to different fabrication requirements, leading to issues with cost, performance, and manufacturability.
Innovation Solution
A method involving the formation of a polysilicon layer on a substrate with features, including a dummy feature, a charge trapping dielectric, and a memory gate, where the memory gate forms a bridge between features, with a contact partially on the bridge, allowing for efficient integration of memory and non-memory devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If memory cells and non-memory devices are integrated on the same substrate, then device functionality and area utilization are improved, but fabrication complexity increases due to different fabrication parameters required by each device type
Solution Approach 1:
The substrate is divided into a memory region containing split-gate memory cells and a non-memory region containing other field-effect devices, allowing each region to be optimized for its specific fabrication requirements while sharing the same substrate
Solution Approach 2:
Different fabrication parameters are applied to different regions of the substrate - the memory region receives processing optimized for split-gate cells while the non-memory region receives processing optimized for other device types, enabling co-integration despite different requirements
2Area of stationary object
If the distance between features is reduced to allow closer device placement, then area utilization is improved, but the risk of bridging between features increases
Solution Approach 1:
A mandrel structure is introduced as an intermediary element between closely spaced features during fabrication. The mandrel acts as a temporary spacer that prevents bridging during the formation process, allowing features to be placed closer together while maintaining reliability. The mandrel is subsequently removed after serving its protective function
Data Source
AI summary
Embodiments described herein generally relate to landing gate pads for contacts and manufacturing methods therefor. A bridge is formed between two features to allow a contact to be disposed, at least partially, on the bridge. Landing the contact on the bridge avoids additional manufacturing steps to create a target for a contact.