Cross-Point Memory Insulating Structures for Thermal Cross-Talk Reduction

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Solution Overview

Problem

Current memory devices face challenges in achieving high integration density and reliability due to thermal cross-talk between adjacent memory cells, which affects data integrity and storage efficiency.

Innovation Solution

The memory device design includes a structure with first and second conductive lines intersecting at cross points, featuring a stack of a selection device layer, a middle electrode layer, a variable resistance layer, and a top electrode layer, with insulating structures having top surfaces higher than the memory cells to extend the heat transmission path and reduce thermal cross-talk.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If memory cells are arranged at cross points of conductive lines with standard insulating structures, then device integration density is achieved, but thermal cross-talk between adjacent memory cells occurs

Engineering Contradiction:
Improveintegration densityVSAvoidthermal cross-talk
Core Design Contradiction:
Quantity of substanceVSObject-affected harmful factors

Solution Approach 1:

The patent introduces an intermediate insulating structure with a higher top surface between adjacent memory cells. This intermediate structure acts as a mediator that blocks thermal pathways while maintaining the cross-point memory architecture. The insulating structure includes an insulating layer and a reflective layer that together prevent heat transfer between neighboring memory cells, solving the thermal cross-talk problem without reducing integration density.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent raises the top surface of the insulating structure to a higher dimension (vertical elevation) than the top electrode layer. By extending the insulating structure upward, it creates a three-dimensional barrier that intercepts thermal pathways in the vertical dimension, preventing heat from transferring between adjacent memory cells while maintaining the planar integration layout.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Object-affected harmful factors

If insulating structures are extended to block thermal pathways, then thermal cross-talk is reduced, but device structure complexity increases

Engineering Contradiction:
Improvethermal cross-talkVSAvoidstructure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent segments the insulating structure into distinct functional layers: an insulating layer and a reflective layer. This segmentation allows each layer to perform its specific function (thermal insulation and thermal reflection) efficiently, while the modular structure makes the complex thermal management task more manageable and manufacturable through standard layered deposition processes.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances the integration density and reliability of memory devices by minimizing thermal cross-talk, improving data retention and storage efficiency while maintaining the cell pitch.

Implementation Method 1

a structure with first and second conductive lines intersecting at cross points, featuring a stack of a selection device layer, a middle electrode layer, a variable resistance layer, and a top electrode layer, with insulating structures having top surfaces higher than the memory cells to extend the heat transmission path and reduce thermal cross-talk

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS10580979B2Memory device and method of manufacturing the same
Publication Date: 2020.03.03 SAMSUNG ELECTRONICS CO LTD
  • US10580979B2 patent drawing
  • US10580979B2 patent drawing
  • US10580979B2 patent drawing

AI summary

A memory device including first conductive lines spaced apart from each other and extending in a first direction; second conductive lines spaced apart from each other and extending in a second direction that is different from the first direction; first memory cells having a structure that includes a selection device layer, a middle electrode layer, a variable resistance layer, and a top electrode layer; and insulating structures arranged alternately with the first memory cells in the second direction under the second conductive lines, wherein the first insulating structures have a top surface that is higher than a top surface of the first top electrode layer, and the second conductive lines have a structure that includes convex and concave portions, the convex portions being connected to the top surface of the top electrode layer and the concave portions accommodating the insulating structures between the convex portions.