Memory-Mapped File Signal Analysis System for Semiconductor Control
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Solution Overview
Problem
In semiconductor manufacturing, the conventional Manufacturing Execution System (MES) increases data transfer load on control software and analyzing systems, potentially leading to system halts due to high data volume and communication burdens, especially when analyzing signals from multiple sensors or measuring instruments.
Innovation Solution
A signal analyzing system that shares input signal data by blocking data transfer on both control apparatus and analyzing system sides, using memory-mapped files to reduce data transmission load and ensure data reliability through counter information inserted within data blocks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the conventional MES system is used to transfer signal data from multiple sensors to the analyzing system, then data transfer capability is provided, but data transfer load on control software increases and system stability deteriorates
Solution Approach 1:
The patent segments the data transfer process by introducing an intermediate data buffer that separates the control software from the analyzing software. Signal data is first written to the buffer by the control software, then read by the analyzing software, dividing the direct transfer path into two independent stages and reducing the burden on control software.
Solution Approach 2:
The patent introduces a data buffer as an intermediary component between the control software and analyzing software. This buffer acts as a mediator that temporarily stores signal data, allowing the control software to write data without waiting for the analyzing software to process it, thereby reducing transfer load and improving system stability.
2Quantity of substance
If data volume increases to analyze signals from multiple sensors, then analysis comprehensiveness is improved, but conversion driver load increases and may cause system halt
Solution Approach 1:
The patent extracts the data transfer and buffering function from the control software to a separate data buffer component. This extraction removes the burden of managing large volumes of signal data from the conversion driver and control software, allowing them to focus on their primary functions while the buffer handles data storage and transfer.
Solution Approach 2:
The patent implements a data copying mechanism where signal data is written to the data buffer and then copied to the analyzing software. This copying approach allows the control software to complete data writing without waiting for analysis, enabling efficient handling of large data volumes from multiple sensors.
3Adaptability or versatility
If direct wiring is used to connect each sensor to the analyzer, then signal analysis capability is provided, but wiring complexity and time increase
Solution Approach 1:
The patent implements a universal data buffer that can receive signal data from multiple different sensors and measuring instruments through a standardized interface. This single buffer serves all sensor types, eliminating the need for separate wiring and analysis configurations for each sensor, thereby reducing wiring complexity while maintaining comprehensive signal analysis capability.
Data Source
AI summary
For example, by providing MMF software 10, 11 transferring data using a memory-mapped file respectively in a semiconductor manufacturing apparatus 1 and in an input signal analyzing system 8, data transfer load placed on control software 4 and analyzing software 9 is reduced. Additionally, in the MMF software 10, by inserting counter information in the memory-mapped file and by observing the information by the MMF software 11, communication abnormality is detected.