3D Memory Package Hybrid Bonding for Shorter Signal Routing

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Solution Overview

Problem

Existing High-Performance Computing (HPC) systems face challenges in reducing latency and improving operation speed due to the distance between memory dies and logic dies, which are typically bonded through solder bonding or metal direct bonding, leading to inefficient electrical routing.

Innovation Solution

The formation of memory packages involves bonding memory devices to peripheral devices using a hybrid bonding technique, which includes a Si—O—Si bond and metal-to-metal direct bond, allowing for reduced routing distances and improved electrical connections through Through-Dielectric Vias (TDVs) and metallization patterns, enabling closer placement of circuitry.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If solder bonding or metal direct bonding is used to bond memory dies to logic dies, then the bonding process is simple and reliable, but the electrical routing distance remains too long, leading to high latency and reduced operation speed

Engineering Contradiction:
Improveoperation speedVSAvoidelectrical routing distance
Core Design Contradiction:
SpeedVSLength of stationary object

Solution Approach 1:

The patent transitions from planar bonding to three-dimensional stacked architecture, placing memory dies directly above logic dies in vertical alignment. This dimensional change enables electrical signals to travel perpendicularly through TSVs rather than laterally across the die surface, dramatically reducing routing distance and latency while maintaining bonding reliability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements nested structures where TSVs are formed within memory dies, interconnect structures are embedded within dielectric layers, and multiple dies are stacked within a single package. This nesting enables compact integration and shortens electrical paths by routing signals through vertically nested conductive pathways rather than extended lateral connections.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Quantity of substance

If memory dies are stacked higher with more layers, then memory capacity increases, but the complexity of bonding and electrical routing increases significantly

Engineering Contradiction:
Improvememory capacityVSAvoidbonding and routing complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent divides the memory system into modular stacked dies, each containing standardized TSVs and interconnect structures. This segmentation allows identical or similar memory dies to be stacked in sequence, simplifying the bonding process through repeatability while increasing capacity through quantity of stacked layers rather than complexity of individual structures.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs universal TSV structures and standardized interconnect designs that serve multiple functions across different die layers. The same TSV formation process and bonding techniques are applied uniformly to stack multiple memory dies, reducing overall system complexity despite increased memory capacity achieved through additional stacked layers.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces latency and enhances high-frequency operation by minimizing the electrical routing distance between memory and peripheral devices, thereby improving the overall performance of the memory structure.

Implementation Method 1

bonding the second device to the first device to electrically couple the first device to the second device

Methodology Applied
Scientific EffectChemical Bonding: Chemical Bonding

Implementation Method 2

metal-to-metal direct bond

Methodology Applied
Scientific EffectMetal bonding: Welding

Data Source

PatentUS12538851B2Memory packages and methods of forming same
Publication Date: 2026.01.27 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12538851B2 patent drawing
  • US12538851B2 patent drawing
  • US12538851B2 patent drawing

AI summary

A package includes a memory stack attached to a logic device, the memory stack including first memory structures, a first redistribution layer over and electrically connected to the first memory structures, second memory structures on the first redistribution layer, a second redistribution layer over and electrically connected to the second memory structures, and first metal pillars on the first redistribution layer and adjacent the second memory structures, the first metal pillars electrically connecting the first redistribution layer and the second redistribution layer, wherein each first memory structure of the first memory structures includes a memory die comprising first contact pads and a peripheral circuitry die comprising second contact pads, wherein the first contact pads of the memory die are bonded to the second contact pads of the peripheral circuitry die.