Memory Pillar Asymmetry for Structural Integrity

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current memory array technologies face challenges in achieving structural integrity and efficient storage of information due to limitations in programmable material thickness and switching characteristics, particularly in resistive RAM and phase change memory cells.

Innovation Solution

The development of memory arrays where memory cells are formed within pillars with varying peripheral configurations, allowing for thicker programmable material and improved structural integrity, enabling enhanced switching characteristics and separation between memory states.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If thinner programmable material is used to achieve higher density, then storage capacity increases, but structural integrity and switching characteristics deteriorate

Engineering Contradiction:
Improvestorage capacityVSAvoidstructural integrity
Core Design Contradiction:
Quantity of substanceVSStrength

Solution Approach 1:

The patent transitions from planar memory structures to three-dimensional pillar structures with varying peripheral configurations. This vertical dimensionality change allows thicker programmable material to be accommodated within the pillar volume, improving structural integrity and switching characteristics while maintaining high storage density through vertical stacking of memory cells between crossing access lines.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs pillars with varying peripheral configurations (different cross-sectional shapes at different heights) rather than uniform cylindrical pillars. This asymmetric design optimizes the structural integrity and electrical characteristics of the programmable material, allowing thicker material deposition while maintaining reliable switching behavior between memory states.

Inventive Principle:
Principle #4Asymmetry

2Strength

If thicker programmable material is used to improve structural integrity, then switching characteristics improve, but storage density decreases

Engineering Contradiction:
Improvestructural integrityVSAvoidstorage density
Core Design Contradiction:
StrengthVSQuantity of substance

Solution Approach 1:

By utilizing vertical pillars extending through multiple layers with crossing access lines, the patent achieves three-dimensional memory cell arrangement. This allows thicker programmable material within each cell while maintaining high density through the vertical stacking approach and cross-point architecture where memory cells are formed at intersections of word and bit lines.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of manufacture

If uniform pillar structures are used for simplicity, then manufacturing ease improves, but structural integrity and switching characteristics worsen

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidstructural integrity
Core Design Contradiction:
Ease of manufactureVSStrength

Solution Approach 1:

The patent employs pillars with varying peripheral configurations (different cross-sectional shapes at different heights) rather than uniform cylindrical pillars. This asymmetric design optimizes the structural integrity and electrical characteristics of the programmable material, allowing thicker material deposition while maintaining reliable switching behavior between memory states.

Inventive Principle:
Principle #4Asymmetry

Data Source

PatentUS9917253B2Methods of forming memory arrays
Publication Date: 2018.03.13 MICRON TECHNOLOGY INC
  • US9917253B2 patent drawing
  • US9917253B2 patent drawing
  • US9917253B2 patent drawing

AI summary

Some embodiments include a memory array having a first series of access/sense lines which extend along a first direction, a second series of access/sense lines over the first series of access/sense lines and which extend along a second direction substantially orthogonal to the first direction, and memory cells vertically between the first and second series of access/sense lines. Each memory cell is uniquely addressed by a combination of an access/sense line from the first series and an access/sense line from the second series. The memory cells have programmable material. At least some of the programmable material within each memory cell is a polygonal structure having a sidewall that extends along a third direction which is different from the first and second directions. Some embodiments include methods of forming memory arrays.