Non-volatile Memory Electricity Supply Line Height Uniformity

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Solution Overview

Problem

The reliability of non-volatile memory semiconductor devices is compromised due to defects in the electricity supply line, which prevents consistent voltage supply to the memory gate electrode, leading to failures in writing and erasing data.

Innovation Solution

A layout configuration where the electricity supply line is formed with one end over the terminal end, the other end over the terminal end, and the central portion over a dummy part, ensuring most of the line has the same height, eliminating out-of-focus issues during exposure processing and maintaining electrical connection with the plug.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the electricity supply line is formed extending from one terminal end to the other terminal end directly, then the manufacturing process is simpler, but the line height varies causing out-of-focus defects during exposure processing

Engineering Contradiction:

Improvemanufacturing process simplicityVSAvoidexposure processing focus uniformity

Core Design Contradiction:

Ease of manufactureVSManufacturing precision

Solution Approach 1:

The electricity supply line is segmented into three parts: first electricity supply line from first terminal end to dummy part, second electricity supply line from dummy part to second terminal end, and the dummy part itself. This segmentation allows each segment to be formed at a uniform height, eliminating out-of-focus defects during exposure processing while maintaining manufacturing simplicity.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The dummy part serves as an intermediary element between the first and second terminal ends. It acts as a intermediate structure that the electricity supply line passes over, enabling the line to maintain constant height throughout its length and ensuring uniform focus during exposure processing.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Manufacturing precision

If the electricity supply line is formed with uniform height using a dummy part, then exposure processing focus uniformity is improved, but the device structure becomes more complex

Engineering Contradiction:

Improveexposure processing focus uniformityVSAvoidelectricity supply line structure

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The dummy part serves multiple functions: it acts as a structural element to maintain uniform line height, serves as a connection point between the first and second electricity supply lines, and provides a reference level for exposure processing. This multi-functionality reduces the need for additional complex structures.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Area of stationary object

If the electricity supply line extends directly between terminal ends, then the area occupied is minimized, but defects occur preventing reliable electrical connection

Engineering Contradiction:

Improveelectricity supply line areaVSAvoidelectrical connection reliability

Core Design Contradiction:

Area of stationary objectVSReliability

Solution Approach 1:

The dummy part is formed beforehand as a cushioning structure that prevents defects in the electricity supply line. By providing a stable, pre-formed structure at the appropriate height, it ensures reliable electrical connection between the memory gate electrode and plug, cushioning against potential manufacturing variations.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Data Source

PatentUS8357968B2Non-volatile memory semiconductor device

Publication Date: 2013.01.22 RENESAS ELECTRONICS CORP

AI summary

A non-volatile memory semiconductor device having one end of an electricity supply line ESL arranged over a terminal end TE1 and the other end thereof arranged over a terminal end TE2, the central portion of the electricity supply line ESL being arranged over a dummy part DMY. The terminal end TE1, the terminal end TE2, and the dummy part DMY have substantially the same height, so that most of the electricity supply line ESL arranged from over the terminal end TE1 to over the terminal end TE2 via the dummy part DMY has the same height.