Capacitive MEMS Accelerometer Continuous Charge Amplifier
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Solution Overview
Problem
Conventional capacitive MEMS-based sensors in seismic acquisition systems face challenges due to sampling noise introduced by switching, which degrades the dynamic range and affects the accuracy of seismic data acquisition.
Innovation Solution
A capacitive MEMS-based accelerometer with a continuously connected charge amplifier, eliminating sampling noise by regulating the equilibrium restoring force and actuation voltage within the same clock phase, allowing the sensor to function as both an actuator and sensor simultaneously, thereby improving the dynamic range and accuracy of seismic data acquisition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional capacitive MEMS-based sensors use switching to control the sensor, then the sensor can be activated, but sampling noise is introduced which degrades dynamic range and affects accuracy
Solution Approach 1:
The patent applies continuity of useful action by maintaining a continuous electrical connection between the MEMS sensor and the charge amplifier throughout the entire clock phase, eliminating the switching operation that causes sampling noise. The sensor remains continuously active and connected, allowing uninterrupted signal transmission from the proof mass to the amplifier, thereby resolving the contradiction between reliable sensor activation and measurement precision.
2Use of energy by moving object
If the charge amplifier is connected only during specific phases, then power consumption is reduced, but sampling noise is introduced during switching transitions
Solution Approach 1:
The patent maintains continuous connection between the sensor and charge amplifier throughout the clock phase, eliminating switching transitions that generate sampling noise. This continuous operation ensures that the useful action of signal transmission occurs without interruption, resolving the contradiction between power consumption and measurement precision by accepting continuous operation to eliminate the harmful switching effects.
3Measurement precision
If the sensor is actuated and sensed simultaneously in the same clock phase, then the sensor functions as both actuator and sensor improving dynamic range, but the system complexity increases
Solution Approach 1:
The patent applies universality by designing the MEMS sensor to serve dual functions as both actuator and sensor within the same clock phase. The sensor is simultaneously actuated by the first signal and sensed by the charge amplifier, allowing the same component to perform multiple functions. This multi-functionality approach improves dynamic range while the patent manages the resulting system complexity through integrated design where the controller and charge amplifier coordinate operations within a single clock phase.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the dynamic range and accuracy of seismic data acquisition by eliminating sampling noise, leading to improved sensitivity and reliability in detecting seismic events, which is crucial for identifying subterranean hydrocarbon deposits.
Implementation Method 1
The sensor includes a proof mass; input terminals to receive a first signal; and an output terminal that is electrically connected to the proof mass to provide a second signal
Implementation Method 2
The charge amplifier provides a third signal, which is indicative of a position of the proof mass
Data Source
AI summary
An apparatus includes a seismic acquisition system that includes an accelerometer. The accelerometer includes a capacitive MEMS-based sensor, a controller and a charge amplifier. The sensor includes a proof mass; input terminals to receive a first signal; and an output terminal that is electrically connected to the proof mass to provide a second signal. The first signal, which is regulated by the controller, controls an equilibrium restoring force for the sensor and causes the sensor to provide the second signal. The charge amplifier provides a third signal, which is indicative of a position of the proof mass. The charge amplifier has an input terminal to continuously receive the second signal during a time in which the first signal controls the equilibrium restoring force and causes the sensor to provide the second signal.