MEMS Pendulum Accelerometer Dual-Mode Control for Drift and Range

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Solution Overview

Problem

Current inertial sensors, such as electrostatic pendulum accelerometers, require precise and costly mechanical and electronic structures to achieve low drift and extended measurement ranges, limiting their practical application.

Innovation Solution

The accelerometric sensor employs a control unit that operates in two modes: a fine control phase for optimal bias performance over a reduced range and an extended control phase for increased dynamic range, using pulses to maintain the pendulum in a predetermined position, allowing for moderate and high-amplitude voltage commands respectively.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If precise mechanical and electronic structures are used, then measurement precision and drift performance are improved, but device complexity and manufacturing cost increase

Engineering Contradiction:
Improvedrift performanceVSAvoidmechanical and electronic structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent implements dynamic switching between two control modes (fine control and extended control) based on operational requirements. The control unit selectively activates different voltage application strategies: fine control for optimal bias performance during nominal operation, and extended control for enhanced dynamic range during exceptional events. This dynamic adaptation allows the sensor to maintain precision without requiring permanently complex structures for extreme conditions.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes operational parameters (voltage amplitude and control strategy) rather than permanently altering the mechanical structure. By adjusting the control parameters between fine and extended modes, the sensor achieves variable performance characteristics without requiring multiple physical structures, thereby reducing overall device complexity while maintaining measurement precision when needed.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If high-amplitude voltage commands are applied continuously, then measurement range is extended, but bias performance degrades

Engineering Contradiction:
Improvemeasurement rangeVSAvoidbias performance
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The control unit dynamically switches between fine control mode (low amplitude, optimal bias) and extended control mode (high amplitude, extended range) based on detected operational conditions. During nominal operation, fine control maintains optimal bias performance. During exceptional events like impacts or sudden movements, the system transitions to extended control to capture the full dynamic range, thus adapting measurement range to actual needs without continuous bias degradation.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system employs periodic monitoring of operational conditions and switches between control modes accordingly. The control unit evaluates whether exceptional events are occurring and periodically transitions between fine and extended control modes, applying high-amplitude commands only when necessary rather than continuously, thereby maintaining bias performance while extending measurement range on demand.

Inventive Principle:
Principle #19Periodic action

3Measurement precision

If fine control mode is used exclusively, then bias performance is optimized, but measurement range is limited during exceptional events

Engineering Contradiction:
Improvebias performanceVSAvoiddynamic range
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The control unit implements dynamic mode switching capability, transitioning from fine control mode to extended control mode when exceptional events are detected. This allows the system to maintain optimal bias performance during normal operation while being adaptable to extended measurement ranges during impacts, sudden movements, or calibration phases, thus resolving the limitation of exclusive fine control mode.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The single control unit is designed to perform multiple functions by supporting both fine control and extended control modes. This multi-functionality allows the same hardware to optimize bias performance during nominal operation and extend measurement range during exceptional events, eliminating the need for separate dedicated systems and enhancing overall adaptability without sacrificing precision capabilities.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach ensures optimal performance over the sensor's operation duration by maintaining low drift during nominal use while extending the measurement range when needed, reducing the complexity and cost of the sensor design.

Implementation Method 1

Two fixed electrodes 4.1, 4.2 are attached to the frame 1 to form with the mobile electrode 3 two capacitors with variable capacitances depending on the distance between electrodes

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 2

the pendulum's position is controlled to a neutral, or setpoint, position midway between the fixed electrodes by applying an electrostatic force to the pendulum. This electrostatic force must therefore compensate for the acceleration applied along the sensitive axis

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Data Source

PatentEP3377910B1MEMS pendulum accelerometer having two measurement ranges
Publication Date: 2021.10.20 SAFRAN ELECTRONICS & DEFENSE (FR)
  • EP3377910B1 patent drawingFigure 1~2
  • EP3377910B1 patent drawingFigure 3
  • EP3377910B1 patent drawing

AI summary

Accelerometer having electrodes forming capacitors of capacitances that vary as a function of a distance between the electrodes, a control unit being arranged to perform a capacitance-measuring operation and a command operation that selectively comprises: a fine control phase in which a first voltage is applied between one of the fixed electrodes and the mobile electrode, the other of the fixed electrodes being at the same potential as the mobile electrode; and an extended control phase in which a second voltage is applied between one of the fixed electrodes and the mobile electrode, the other of the fixed electrodes being the same potential as the mobile electrode and the second voltage being higher in absolute value than the first voltage. Method using such a sensor.