MEMS Accelerometer Multi-Directional Sensing via 3D Spring Bumps
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Solution Overview
Problem
Current microelectromechanical systems (MEMS) face limitations in measuring movements and accelerations in multiple spatial directions due to small mass and lateral extent of movable parts, restricting deflection amplitudes and frequency ranges, and are typically limited to measuring in one spatial direction.
Innovation Solution
A microelectromechanical system comprising a mass element, a substrate, and a signal generator with a fixing structure that allows the mass element to move relative to the substrate in at least two spatial directions, enabling the generation of signals through the movement of the mass element, utilizing various signal generation methods such as magnetic coils, electrodes, and piezoresistive materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If small membrane and tongue structures are used to fix a mass element, then the device size is reduced, but the deflection amplitudes and frequency ranges are restricted
Solution Approach 1:
The patent transitions from planar membrane structures to three-dimensional spring bump structures that extend vertically from the substrate. This dimensional change allows the mass element to move in multiple spatial directions (at least two directions) while maintaining a compact footprint, thereby increasing deflection amplitudes and frequency ranges without proportionally increasing device area.
2Volume of moving object
If small membrane and tongue structures are used to fix a mass element, then the device size is reduced, but the measurement capability in multiple spatial directions is limited
Solution Approach 1:
The spring bump structure provides three-dimensional support that enables the mass element to move in multiple spatial directions (at least two directions), allowing simultaneous measurement of accelerations in multiple directions while maintaining a compact device footprint.
Solution Approach 2:
The single mass element supported by spring bumps serves multiple measurement functions simultaneously, detecting accelerations in at least two spatial directions, thereby providing multi-directional measurement capability from a unified structure.
3Volume of moving object
If small membrane and tongue structures are used to fix a mass element, then the device size is reduced, but the deflection amplitudes are restricted
Solution Approach 1:
The spring bump structures extend vertically from the substrate, providing three-dimensional movement space for the mass element. This allows larger deflection amplitudes in vertical and lateral directions simultaneously, overcoming the planar constraints of membrane structures while maintaining compact device dimensions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise measurement of accelerations in multiple spatial directions simultaneously, with improved mass and signal generation capabilities, enhancing the efficiency of movement and acceleration sensing compared to traditional MEMS technologies.
Implementation Method 1
the electrical measurement is preferably effected capacitively or piezoresistively
Implementation Method 2
the electrical measurement is preferably effected capacitively or piezoresistively
Data Source
AI summary
In various embodiments, a microelectromechanical system may include a mass element; a substrate; a signal generator; and a fixing structure configured to fix the mass element to the substrate; wherein the mass element is fixed in such a way that, upon an acceleration of the microelectromechanical system, the mass element can be moved relative to the substrate in at least two spatial directions, and wherein a signal is generated by the movement of the mass element by means of the signal generator.