MEMS Actuator Structure for Bidirectional Gear Rotation

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Solution Overview

Problem

Existing microelectromechanical systems (MEMS) are limited to driving a gear in only one direction of rotation, necessitating two separate drive devices to achieve bi-directional rotation, which increases the system's size.

Innovation Solution

A microelectromechanical system with a single actuator comprising a drive module, clutch module, and indexing module, utilizing electrostatic and elastic forces to achieve bi-directional rotation through a movable stop and locking mechanism, allowing independent control of tangential and radial movements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If two separate drive devices are used to drive the gear in both directions, then the gear can rotate in two opposite directions, but the system size increases

Engineering Contradiction:
Improvebi-directional rotation capabilityVSAvoidsystem footprint
Core Design Contradiction:
Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The single actuator is designed to perform multiple functions: it can drive the gear in both clockwise and counter-clockwise directions, and it can also engage and disengage from the gear. This is achieved through a movable stop mechanism that can be positioned to enable bidirectional rotation, eliminating the need for separate actuators for each function.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The stop mechanism is made movable rather than fixed, allowing it to be repositioned to control the actuator's range of motion in different directions. This dynamic adjustment enables the single actuator to achieve bidirectional rotation by changing the mechanical constraints on its movement, rather than requiring multiple fixed actuators.

Inventive Principle:
Principle #15Dynamics

2Ease of operation

If the elastic restoring force is used to rotate the gear in the opposite direction, then the actuator returns to initial position, but the elastic restoring force decreases as the module approaches initial position making it insufficient to move the gear a full step

Engineering Contradiction:
Improveactuator return movementVSAvoidelastic restoring force magnitude
Core Design Contradiction:
Ease of operationVSForce

Solution Approach 1:

The actuator is designed with preliminary action where the electrostatic force not only drives the gear forward but also pre-positions the actuator and engages the stop mechanism in advance. This preliminary engagement of the stop ensures that when the actuator returns, the elastic restoring force is maintained at sufficient levels throughout the entire return stroke, rather than decreasing to zero.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables bi-directional rotation of a gear using a single actuator, reducing the system's footprint while maintaining control over both directions of rotation.

Implementation Method 1

a first elementary module for moving the drive tooth in a first direction (radial direction)

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Implementation Method 2

a second elementary module for moving the tooth in a second direction (tangential direction) relative to the gear

Methodology Applied
Scientific EffectElastic restoring force: Elasticity

Data Source

PatentEP4341753B1Microelectromechanical system for moving a mechanical part in two opposite directions
Publication Date: 2025.12.24 SILMACH
  • EP4341753B1 patent drawingFigure 1
  • EP4341753B1 patent drawingFigure 2
  • EP4341753B1 patent drawingFigure 3

AI summary

The invention relates to a microelectromechanical system (10), comprising a drive module (200) comprising: - a stationary drive part (210), - a movable drive part (220), and - a suspension (230), the movable drive part (220) being capable of being moved with respect to the stationary drive part (210) in a first direction (A) when exposed to an electrostatic force which causes an elastic deformation of the suspension (230), and the movable drive part (220) being capable of being moved with respect to the stationary drive part (210) in a second direction (B), opposite to the first direction (A), when exposed to an elastic return force generated by the suspension (230), the actuator (11) further comprising an abutment (240) which limits the movement of the first movable part (220) in the second direction (B) so that the elastic force generated by the suspension (230) is not cancelled out.