MEMS Actuator Capping Structure for Oscillation Impact Resistance

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Solution Overview

Problem

Existing MEMS devices are prone to breakage due to oscillatory impacts during operation, making repairs or replacements challenging, especially for micromechanical arms which are often on the microscale or nanoscale, compromising the functionality of sensor-shift OIS systems.

Innovation Solution

A MEMS actuator design featuring an array of micromechanical arms tethered by top and bottom capping members with rivet structures, providing vibration isolation, resonance control, and damping to mitigate the impact of external vibrations and reduce unwanted oscillations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional MEMS fabrication methods are used, then manufacturing simplicity is maintained, but the MEMS components are prone to breakage due to oscillatory impacts

Engineering Contradiction:

Improveimpact resistanceVSAvoidcapping member structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The capping member serves as an intermediary protective structure that absorbs and dissipates impact forces before they reach the fragile micromechanical components. The rivet structures act as intermediate elements that securely attach the capping member to the substrate, creating a protective assembly that shields the internal MEMS components from external shocks and oscillatory impacts.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The capping member is positioned beforehand to cover and protect the micromechanical components before impact occurs. This protective structure is pre-installed on the substrate, creating a cushioning effect that mitigates the harmful effects of oscillatory impacts and external vibrations on the delicate internal components during operation.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

2Measurement precision

If micromechanical arms are made smaller for sensor-shift OIS, then precision is improved, but susceptibility to breakage from oscillations increases

Engineering Contradiction:

Improvesensor precisionVSAvoidimpact resistance

Core Design Contradiction:

Measurement precisionVSStrength

Solution Approach 1:

The capping member functions as a protective shell that encloses the micromechanical arms, providing structural support and impact resistance while allowing the delicate internal components to maintain their precise, small-scale geometry. This shell structure protects the fragile precision components from mechanical damage during operation.

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The assembly combines the delicate micromechanical arms with the more robust capping member and rivet structures, creating a composite system where the protective outer structure compensates for the fragility of the internal precision components. This composite approach allows small, precise components to be protected from oscillatory impacts that would otherwise cause breakage.

Inventive Principle:

Principle #40Composite materials

3Reliability

If capping members with rivet structures are added, then vibration isolation is improved, but manufacturing complexity increases

Engineering Contradiction:

Improvevibration resistanceVSAvoidfabrication process

Core Design Contradiction:

ReliabilityVSEase of manufacture

Solution Approach 1:

The protective structure is segmented into distinct functional components: the capping member for vibration isolation and impact protection, and the rivet structures for secure attachment to the substrate. This segmentation allows each component to be optimized for its specific function while being manufactured through integrated semiconductor fabrication processes that deposit and pattern multiple material layers.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The rivet structures utilize material parameter changes through deposition processes, where metallic layers are deposited and then selectively removed or patterned to form the rivet geometry. This approach uses standard semiconductor manufacturing parameter changes (deposition, etching, patterning) to create the protective assembly without requiring entirely new fabrication techniques.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed design enhances the robustness and impact resistance of MEMS actuators, reducing the likelihood of component breakage and maintaining the functionality of sensor-shift OIS systems.

Implementation Method 1

providing vibration isolation, resonance control, and damping to mitigate the impact of external vibrations and reduce unwanted oscillations

Methodology Applied

Scientific EffectVibration isolation: Damping

Implementation Method 2

providing vibration isolation, resonance control, and damping to mitigate the impact of external vibrations and reduce unwanted oscillations

Methodology Applied

Scientific EffectResonance control: Resonance

Data Source

PatentUS20250361140A1Micro-electromechanical systems (MEMS) and methods of fabricating the same

Publication Date: 2025.11.27 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

An actuator of a micro-electromechanical system (MEMS) includes a semiconductor substrate. The actuator includes an array of micromechanical arms disposed over the semiconductor substrate. The actuator includes a first capping member disposed over the micromechanical arms. The actuator includes a second capping member disposed opposite the first capping member such that the micromechanical arms extend between the first capping member and the second capping member along a vertical direction.