MEMS Actuator Device Deployment for Miniature Camera OIS
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Solution Overview
Problem
Miniature cameras face challenges in achieving advanced features like optical image stabilization (OIS) due to the large size and high cost of existing actuator devices needed for relative movement of optical elements, which are not feasible in smaller, more affordable devices.
Innovation Solution
Development of smaller and simpler actuator devices with a planar structure that includes a stage resiliently supported for movement, coupled with actuators that apply forces tangentially and perpendicularly, allowing for in-plane and out-of-plane movement of optical elements, enabling efficient deployment and operation in miniature camera systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional actuators are used to achieve OIS and focus capabilities, then optical performance is improved, but device size and cost increase significantly
Solution Approach 1:
The patent replaces traditional mechanical actuators (voice coil or Lorentz actuators) with a MEMS-based actuator that uses electrostatic forces to drive the stage. This substitution of the actuation mechanism enables OIS functionality while dramatically reducing the size of the actuator device, as MEMS structures can be fabricated using standard semiconductor processes and occupy minimal space compared to conventional mechanical actuators.
Solution Approach 2:
The patent changes the operating parameters and physical principles of the actuator by transitioning from electromagnetic actuation (voice coil/Lorentz) to electrostatic actuation (MEMS comb drives). This parameter change allows for miniaturization while maintaining the essential OIS function, as electrostatic MEMS actuators can achieve sufficient force output at much smaller scales than their electromagnetic counterparts.
2Reliability
If traditional actuators are used to achieve focus and zoom capabilities, then optical performance is improved, but device complexity increases
Solution Approach 1:
The patent merges multiple actuator functions (OIS, focus, and potentially zoom) into a single integrated MEMS actuator device. The planar structure with the movable stage can accommodate multiple interdigitated comb drive actuators that work together to provide both stabilization and focusing capabilities, eliminating the need for separate mechanical actuator assemblies and reducing overall system complexity.
Solution Approach 2:
The MEMS actuator device is designed with multi-functionality, where the same basic structure (movable stage with comb drive actuators) can provide both OIS and focus adjustment functions. By configuring the comb drive actuators appropriately, the device can achieve multiple optical functions without requiring separate specialized actuators, thereby reducing device complexity.
3Reliability
If traditional actuators are used to achieve advanced optical features, then functional performance is improved, but manufacturing cost increases
Solution Approach 1:
The patent replaces expensive, precision-machined mechanical actuators with MEMS structures that can be fabricated using standard semiconductor manufacturing processes. This substitution dramatically reduces manufacturing costs because MEMS devices can be produced in high volumes using batch fabrication techniques similar to those used for integrated circuits, whereas traditional mechanical actuators require costly precision machining and assembly operations.
Solution Approach 2:
The patent changes the manufacturing approach by transitioning from discrete mechanical component assembly to integrated MEMS fabrication. This parameter change in the manufacturing process enables cost-effective production of actuators with advanced optical features, as MEMS structures can be created in large quantities using established semiconductor industry processes that are highly optimized for volume production.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the implementation of advanced features such as OIS in miniature cameras with reduced size and cost, providing reliable and efficient movement of optical elements, comparable to higher-end camera systems.
Implementation Method 1
a moving frame resiliently supported for reciprocal movement relative to the fixed frame by a motion control flexure
Implementation Method 2
voice coil or Lorentz actuators that are used, for example, to move a lens
Data Source
AI summary
A method for making an actuator device includes forming a substantially planar structure having a stage resiliently supported for movement within a plane of the structure, an actuator coupled to an outer periphery of the stage and operable to apply a force acting in the plane and tangentially to the stage when actuated, the actuator comprising a fixed frame and a moving frame resiliently supported for reciprocal movement relative to the fixed frame by a motion control flexure, and an outer frame surrounding and supporting the stage and the actuator. The moving frame is moved to a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance, and the moving frame is then fixed at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.