MEMS Actuator Orthogonal Electrode Flexure Coupling

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Solution Overview

Problem

There is a need for miniaturized MEMS actuators that can fit within the size, power, and cost constraints of portable devices, imaging-related devices, and medical instruments, while providing efficient mechanical motion conversion from electronic signals.

Innovation Solution

The development of a micro-electrical-mechanical system (MEMS) assembly comprising a stationary stage, a rigid stage, flexures, flexible electrodes, and rigid electrodes, configured to slidably couple and energize each other orthogonally, enabling efficient actuation systems such as in-plane and out-of-plane MEMS actuators with comb drive sectors and piezoelectric actuation for precise motion control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If conventional actuators are used, then mechanical motion conversion is achieved, but the size and power consumption exceed constraints of portable devices

Engineering Contradiction:

Improvepower consumptionVSAvoidactuator size

Core Design Contradiction:

Use of energy by moving objectVSLength of moving object

Solution Approach 1:

The patent replaces conventional mechanical actuators with MEMS-based actuation systems that use electrostatic fields, piezoelectric effects, or magnetic fields to produce mechanical motion. This substitution enables miniaturization while maintaining actuation functionality, directly resolving the contradiction between size and power consumption constraints.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs out-of-plane movement mechanisms where the imaging device moves perpendicular to the sensor plane, enabling compact in-plane integration while achieving effective stabilization. This dimensional approach allows small form factor actuators to produce sufficient corrective motion.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Volume of moving object

If MEMS actuators are miniaturized to fit portable devices, then size constraints are met, but manufacturing precision becomes more difficult

Engineering Contradiction:

Improveactuator volumeVSAvoidfabrication precision

Core Design Contradiction:

Volume of moving objectVSManufacturing precision

Solution Approach 1:

The patent divides the actuation system into modular MEMS components that can be fabricated using standard microfabrication processes on silicon wafers. This segmentation enables precise control of each element's dimensions and properties, achieving required manufacturing precision through batch processing and standardized techniques.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent utilizes changes in physical parameters such as electrostatic field strength, piezoelectric material properties, or magnetic field intensity to achieve precise actuation control. By adjusting these parameters rather than relying solely on mechanical precision, the system achieves accurate motion control despite miniaturization challenges.

Inventive Principle:

Principle #35Parameter changes

3Measurement precision

If complex actuation mechanisms are used for precise motion control, then positioning accuracy is improved, but device complexity increases

Engineering Contradiction:

Improvepositioning accuracyVSAvoidactuation system complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent designs MEMS actuators that serve multiple functions: they provide both actuation force and structural support, integrate sensing and actuation in some configurations, and enable both in-plane and out-of-plane stabilization. This multi-functionality reduces overall system complexity while maintaining positioning accuracy.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent introduces flexure elements as intermediary components that translate small electrostatic or piezoelectric displacements into larger, controlled movements of the imaging device. These flexures act as mechanical mediators that amplify motion while maintaining precision, simplifying the direct actuation mechanism.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows for compact, low-power MEMS actuators that provide precise mechanical motion, enabling applications in camera packages with two-axis or three-axis movement, enhancing device performance and efficiency within constrained spaces.

Implementation Method 1

at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage, and at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage

Methodology Applied

Scientific EffectElectrostatic actuation: Electrostatics

Implementation Method 2

piezoelectric actuation for precise motion control

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS11261081B2MEMS actuation systems and methods

Publication Date: 2022.03.01 MEMS DRIVE (NANJING) CO LTD

AI summary

A micro-electrical-mechanical system (MEMS) assembly includes a stationary stage, a rigid stage, at least one flexure configured to slidably couple the stationary stage and the rigid stage, at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage, and at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage.