MEMS Actuator Electrical Routing via Trench Insulation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The challenge in miniature camera technology is to reduce size while maintaining functionality and enhancing shock resistance, particularly in electronic devices like cellular telephones and surveillance devices, where existing actuators are limited by size and structural integrity.
Innovation Solution
The development of a MEMS actuator device formed using a first conductive material with a trench and a non-conductive layer, where a second conductive material is deposited, allowing for voltage communication and motion control of a platform, enabling precise movement and alignment of optical elements within a compact and robust structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If traditional actuators are used in miniature cameras, then the camera can perform focusing and zooming functions, but the size of the camera cannot be reduced further and shock resistance is limited
Solution Approach 1:
The actuator device is segmented into distinct functional layers including conductive material layers, non-conductive material layers, and flexible substrates. This segmentation allows each layer to be optimized independently for its specific function while contributing to overall device compactness and shock resistance through the modular structure.
Solution Approach 2:
The patent employs composite material structures combining conductive materials (for electrical pathways), non-conductive materials (for insulation and structural support), and flexible substrates. This composite approach enables simultaneous achievement of small size, electrical functionality, and enhanced shock resistance through material property diversity.
2Ease of operation
If the actuator device uses multiple material layers for functionality, then electrical routing and motion control are improved, but the device structure becomes more complex
Solution Approach 1:
Multiple functional elements are merged into integrated layers within the actuator device. Conductive pathways, insulating structures, and flexible substrates are combined in a stacked configuration that achieves complex electrical routing and mechanical functionality while maintaining a compact overall structure through vertical integration rather than horizontal expansion.
Data Source
AI summary
An electronic device may have a MEMS device formed of a first conductive material. A trench may be formed in the MEMS device. A layer of non-conductive material may be formed in the trench. A second conductive material may be formed upon the non-conductive material.