MEMS Actuator Wiring Rigidity and Stress Management
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Solution Overview
Problem
In MEMS actuator devices, high-speed oscillation of the movable portion can lead to metal fatigue in wirings on the connection and support portions, causing deterioration and potential disconnection due to stress and rigidity issues.
Innovation Solution
The actuator device employs a first wiring with higher rigidity on the connection portion and a second wiring with lower rigidity on the support portion, connected in a specific configuration to reduce stress and prevent deterioration, with the second wiring connected to the surface opposite to the support portion to alleviate stress on the first wiring, thereby suppressing deterioration of both the connection and support wirings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a high-rigid metal material is used for the first wiring on the connection portion, then deterioration of the wiring is suppressed, but stress concentration occurs at the connection part
Solution Approach 1:
The patent applies local quality by using different metal materials with different rigidities in different locations. The first wiring on the connection portion uses high-rigid metal material to suppress deterioration, while the second wiring on the support portion uses low-rigid metal material to reduce stress concentration. This localized material differentiation resolves the contradiction between wiring durability and stress concentration.
2Reliability
If all wirings are formed of high-rigid metal material, then wiring deterioration is suppressed, but deformation of the support portion occurs
Solution Approach 1:
The patent implements local quality by strategically placing high-rigid metal material only where needed (first wiring on connection portion) while using low-rigid metal material in areas where flexibility is required (second wiring on support portion). This prevents support portion deformation while maintaining wiring durability in critical areas.
3Reliability
If the second wiring is connected to the support portion surface, then electrical connection is achieved, but stress is applied to the second wiring
Solution Approach 1:
The patent applies dimensionality change by connecting the second wiring to the surface opposite to the support portion in the first connection part, rather than connecting it directly to the support portion surface. This spatial repositioning allows electrical connection to be achieved while avoiding direct stress application to the second wiring, as the connection is made at a location where stress from the support portion is not directly transmitted.
Data Source
AI summary
An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis so that the movable portion is swingable about the second axis, a first wiring which is provided on the connection portion, and a second wiring which is provided on the support portion. The rigidity of a first metal material forming the first wiring is higher than that of a second metal material forming the second wiring. The second wiring is connected to a surface opposite to the support portion in a first connection part located on the support portion in the first connection part.