Single-Layer MEMS Air Pulse Generator for Full Audio Bandwidth
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Solution Overview
Problem
Conventional speaker drivers face challenges in covering the entire audio frequency band due to membrane displacement issues and require large enclosures for high fidelity sound production, while existing air pulse generating elements for sound producing devices are complex to manufacture and have high yield loss rates.
Innovation Solution
An air pulse generating element with a membrane and valves fabricated at a single layer, allowing for reduced manufacturing complexity and lower yield loss rates by using valve control signals to manage air flow and pressure within a chamber, enabling efficient sound production across the audio frequency band.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If valves and membrane are fabricated at different layers (3-layer structure), then sealing performance and reliability are improved, but manufacturing complexity and yield loss rate increase significantly
Solution Approach 1:
The patent merges the valve and membrane fabrication into a single layer, eliminating the need for multiple layer alignments. The valve is fabricated as an integrated structure with the membrane in the same MEMS layer, reducing manufacturing steps from 3-layer sequential fabrication to single-layer fabrication, thereby lowering complexity and yield loss while maintaining sealing performance through integrated design
2Device complexity
If conventional speaker driver is used, then simple structure is maintained, but frequency coverage is limited and enclosure size must be large for high fidelity
Solution Approach 1:
The patent replaces the conventional mechanical speaker driver system with an air pulse generating element based on MEMS valves and membrane. This substitution enables electronic control of air pulses at frequencies above human hearing range, allowing synthesis of audible sound through amplitude modulation, thereby achieving full frequency coverage without the mechanical limitations of traditional speakers
3Adaptability or versatility
If air pulse generating element with multi-layer structure is used, then sound production capability is achieved, but manufacturing cost and yield loss increase due to multiple fabrication layers
Solution Approach 1:
The patent combines valve and membrane fabrication into a single MEMS layer, eliminating sequential multi-layer fabrication steps. This merging reduces the probability of yield loss from multiple alignment and fabrication steps to a single fabrication process, thereby improving productivity and reducing manufacturing cost while maintaining sound production capability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution allows for the production of sound across the entire audio frequency band with reduced manufacturing complexity and lower yield loss rates, achieving cost-effective and efficient sound generation.
Implementation Method 1
the membrane is alternately driven to move upward or downward in response to a membrane driving voltage
Implementation Method 2
a plurality of valves, disposed by the membrane within the chamber, configured to seal a plurality of openings of the chamber in response to a plurality of valve control signals
Data Source
AI summary
An air pulse generating element, disposed in a sound producing device, includes a membrane, disposed within a chamber; and a plurality of valves, disposed by the membrane within the chamber, configured to seal a plurality of openings of the chamber in response to a plurality of valve control signals; wherein the membrane and the plurality of valves are all fabricated at a first layer.