MEMS Angular Velocity Sensor Branched Beam Coriolis Transfer
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Solution Overview
Problem
Existing angular velocity sensors using silicon micro electro mechanical systems (MEMS) technology face challenges in efficiently transferring the Coriolis effect to the frame, leading to deterioration of detection accuracy due to hinge deformation.
Innovation Solution
The physical quantity sensor element incorporates a beam portion with a branched structure that enhances bending rigidity in the direction of the Coriolis effect, allowing efficient transfer of this effect from the mass portion to the supporting portion, reducing leakage vibration and improving detection accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a hinge is used to connect mass portions and frame, then the structure can be flexible and easy to manufacture, but the hinge becomes greatly deformed and cannot efficiently transfer Coriolis effect, resulting in deterioration of detection accuracy
Solution Approach 1:
The beam portion is divided into multiple segments including a first beam portion, a second beam portion, and a third beam portion. This segmentation allows each segment to have optimized structural characteristics for transferring Coriolis effect while maintaining manufacturing feasibility through standardized components.
Solution Approach 2:
Different portions of the beam structure have different cross-sectional areas optimized for their specific functions. The first beam portion has a first cross-sectional area, the second beam portion has a second cross-sectional area, and the third beam portion has a third cross-sectional area. This local quality optimization ensures efficient Coriolis effect transfer at each location while maintaining overall structural integrity and manufacturability.
2Ease of manufacture
If the beam structure is simplified for easy manufacture, then manufacturing cost decreases, but the bending rigidity in the direction of Coriolis effect is insufficient, causing leakage vibration and reduced detection accuracy
Solution Approach 1:
The beam structure implements local quality by varying the cross-sectional area at different locations. The first beam portion, second beam portion, and third beam portion each have specifically designed cross-sectional areas that provide the necessary bending rigidity for their functional requirements while maintaining manufacturing simplicity through a modular design approach.
Solution Approach 2:
The invention addresses the rigidity requirement by considering three-dimensional structural characteristics rather than simply increasing beam length or thickness uniformly. The varying cross-sectional areas in different spatial dimensions allow the structure to achieve high bending rigidity in the Coriolis effect direction while maintaining ease of manufacture through standardized production methods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the detection accuracy of angular velocity by efficiently transferring the Coriolis effect and minimizing leakage vibration, resulting in improved sensor performance.
Implementation Method 1
efficiently transfer Coriolis effect to the supporting portion from the mass portion
Data Source
AI summary
A physical quantity sensor element is provided with a detecting portion, a driving portion, a beam portion which connects a detecting portion and the driving portion to each other, and in which the beam portion includes a branched portion. The beam portion includes two mass portion side beam portions which extend from two position of the driving portion, which are different from each other, and two supporting portion side beam portions which extend from two positions of the detecting portion, which are different from each other, and in which both end portions on the detecting portion side of two mass portion side beam portions are connected to each other, and both end portions on the driving portion side of two supporting portion side beam portions are connected to each other.