MEMS Antenna Phase Shifter for Precise Microwave Beam Control
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Solution Overview
Problem
Existing phase shifters face challenges such as high manufacturing costs, large volume, and complex processes for ferrite materials, and high power consumption and process difficulty for semiconductor phase shifters, limiting their large-scale application, while MEMS phase shifters offer advantages like small volume and low insertion loss but require improvements in power capacity and control accuracy.
Innovation Solution
A MEMS phase shifter design incorporating a dielectric substrate with membrane bridges and switch units for precise phase control, featuring a phase shifter with a dielectric substrate, signal and reference electrodes, interlayer insulating layer, and phase control units, along with switch units for independent control of membrane bridges to adjust phase shifts and reduce hysteresis effects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If ferrite material phase shifter is used, then power capacity is improved and insertion loss is reduced, but manufacturing cost increases and device volume increases
Solution Approach 1:
The patent replaces ferrite material-based mechanical/ferromagnetic phase shifting mechanisms with a MEMS-based electromagnetic field control system. The MEMS phase shifter uses movable conductive elements (plates or pins) that can be positioned by electrostatic forces to adjust phase, eliminating the need for ferrite materials and their associated complex manufacturing processes while maintaining power handling capabilities
Solution Approach 2:
The patent changes the fundamental operating parameters of the phase shifter by transitioning from ferrite material properties (magnetic permeability changes) to MEMS geometric parameter changes (position, area, or spacing of conductive elements). This allows phase control through physical reconfiguration rather than material property modification, reducing manufacturing complexity and cost
2Volume of moving object
If semiconductor phase shifter is used, then device volume is reduced and operating speed is improved, but power consumption increases and process difficulty increases
Solution Approach 1:
The patent replaces semiconductor-based electronic phase shifting (which requires continuous power for active components like PIN diodes or transistors) with a MEMS system that uses minimal power primarily for positioning the movable elements. Once positioned, the MEMS structure maintains its state passively, significantly reducing steady-state power consumption while achieving compact form factor
Solution Approach 2:
The patent employs periodic or pulsed actuation of the MEMS elements rather than continuous power application. The movable elements are positioned only when phase adjustment is needed, and then maintain their position without continuous power input, reducing overall power consumption compared to semiconductor alternatives that require continuous biasing
3Volume of moving object
If MEMS phase shifter is used, then device volume is reduced and insertion loss is reduced, but power capacity needs improvement and control accuracy needs improvement
Solution Approach 1:
The patent divides the phase control function into multiple independently controllable MEMS elements (multiple movable plates or pins) that can be individually positioned. This segmentation allows for fine-grained phase adjustment by combining the effects of multiple elements, achieving high control accuracy and precision while maintaining compact device volume
Solution Approach 2:
The patent employs dynamically adjustable MEMS structures where the position, area, or spacing of movable conductive elements can be continuously or discretely adjusted. This dynamic reconfigurability enables precise phase control by optimizing the electromagnetic interaction between signal and reference electrodes, achieving high control accuracy in a compact form factor
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves improved control accuracy, reduced transmission loss, and enhanced radiation efficiency of microwave signals, enabling precise phase shifting and efficient antenna operation.
Implementation Method 1
each of the at least one phase control unit includes at least one membrane bridge on a side of the interlayer insulating layer away from the dielectric substrate; the first signal electrode is in a space surrounded by the at least one membrane bridge and the dielectric substrate
Implementation Method 2
an antenna unit electrically connected to the second transmission structure
Data Source
AI summary
The present disclosure provides an antenna, an antenna array and a communication system, and belongs to the field of communication technology. The antenna of the present disclosure includes: a phase shifter, including: a dielectric substrate, a first signal electrode, a first reference electrode, a second reference electrode, an interlayer insulating layer, at least one phase control unit; a first transmission structure and a second transmission structure; wherein the first transmission structure is electrically connected to one end of the first signal electrode, and the second transmission structure is electrically connected to the other end of the first signal electrode; and an antenna unit electrically connected to the second transmission structure.