MEMS Audio Input Device Resonant Frequency Control

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Solution Overview

Problem

Existing electronic devices with audio input devices, such as microphones, face challenges in efficiently converting sound waves into electrical signals due to limitations in resonant frequency adjustment and sensitivity optimization.

Innovation Solution

The electronic device incorporates an audio input device with a substrate and MEMS, featuring a through hole for sound wave transmission, a seating groove for adjusting the volume of the first space, and a support that occupies a portion of the space to maintain constant volume and adjust resonant frequency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the volume of the first space is increased to improve sensitivity, then the resonant frequency decreases, but the frequency response characteristic deteriorates

Engineering Contradiction:
ImprovesensitivityVSAvoidfrequency response characteristic
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent applies parameter changes by adjusting the volume of the first space to optimize the balance between sensitivity and frequency response characteristic. Specifically, the first space is designed to have a volume of 0.05 mm³ to 0.5 mm³, which maintains the resonant frequency at 2 kHz or higher while ensuring sufficient sensitivity for accurate sound wave detection.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If the diaphragm size is increased to improve sensitivity, then the resonant frequency decreases, but the frequency response characteristic deteriorates

Engineering Contradiction:
ImprovesensitivityVSAvoidfrequency response characteristic
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent applies parameter changes by optimizing the diaphragm dimensions within specific ranges (length: 10 μm to 50 μm, width: 10 μm to 50 μm, thickness: 1 μm to 10 μm). These parameter adjustments ensure that the diaphragm maintains appropriate resonant frequency characteristics while achieving sufficient sensitivity for sound wave detection.

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If the first space volume is not controlled, then manufacturing is simpler, but the resonant frequency cannot be optimized

Engineering Contradiction:
Improvestructural simplicityVSAvoidresonant frequency
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies parameter changes by defining specific volume ranges for the first space (0.05 mm³ to 0.5 mm³) that can be achieved through standard manufacturing processes while optimizing the resonant frequency. This approach balances manufacturing feasibility with performance optimization.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the frequency response characteristic and sensitivity of the audio input device, improving noise reduction and maintaining consistent performance across varying diaphragm sizes.

Implementation Method 1

a through hole through which sound waves transmitted from the hole of the housing pass

Methodology Applied
Scientific EffectSound wave transmission: Sound

Implementation Method 2

micro electro mechanical systems (MEMS)

Methodology Applied
Scientific EffectMEMS (Micro Electro Mechanical Systems): Microelectromechanical Systems

Implementation Method 3

a resonant frequency of the audio input device is adjusted based on a volume of a first space surrounded by the surface of the substrate, the side wall of the MEMS, and the diaphragm of the MEMS

Methodology Applied
Scientific EffectResonant frequency adjustment: Resonance

Data Source

PatentUS20250184657A1Electronic device comprising audio input device
Publication Date: 2025.06.05 SAMSUNG ELECTRONICS CO LTD
  • US20250184657A1 patent drawing
  • US20250184657A1 patent drawing
  • US20250184657A1 patent drawing

AI summary

An electronic apparatus includes: a housing includes a hole; and an audio input device in the housing and includes a substrate and micro electro mechanical systems (MEMS). The substrate includes: a through hole through which sound waves transmitted from the hole of the housing pass, and a seating groove that is spaced apart from a periphery of the through hole, the seating groove being dented from a surface of the substrate. The MEMS includes: a side wall, a diaphragm, and a plate. A resonant frequency of the audio input device is adjusted based on a volume of a first space surrounded by the surface, the side wall, and the diaphragm.