MEMS Microphone Back Plate Reinforcing Ribs
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Solution Overview
Problem
MEMS microphones in existing technologies face challenges with the strength of the back plate, which affects the reliability of the device due to the presence of through-holes that reduce the back plate's strength.
Innovation Solution
The proposed MEMS microphone incorporates a back plate with a body portion, a fixing portion connected to the substrate, and a plurality of strip reinforcing ribs protruding from the body portion. These reinforcing ribs are connected to opposite edges of the body portion, some passing through the center of the back plate, and are arranged in a centrally symmetrical radial pattern to enhance the back plate's strength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If through-holes are provided in the back plate, then the acoustic performance is improved, but the strength of the back plate is reduced
Solution Approach 1:
The back plate is segmented into multiple regions by adding reinforcing ribs that divide the plate structure. These ribs create distinct zones that can independently bear load, effectively distributing the mechanical stress across multiple segments rather than relying on the continuous plate structure, thereby maintaining strength despite the presence of through-holes.
Solution Approach 2:
The reinforcing ribs are strategically positioned at specific locations where stress concentration is most likely to occur, particularly around the through-holes and at the edges of the back plate. This localized reinforcement provides targeted strength enhancement only where needed, rather than uniformly thickening the entire back plate, thus maintaining acoustic performance while improving structural integrity.
2Ease of manufacture
If the back plate structure is simplified, then the manufacturing cost is reduced, but the reliability of the MEMS microphone is affected
Solution Approach 1:
The back plate is segmented into multiple regions by adding reinforcing ribs that divide the plate structure. These ribs create distinct zones that can independently bear load, effectively distributing the mechanical stress across multiple segments rather than relying on the continuous plate structure, thereby maintaining strength despite the presence of through-holes.
Solution Approach 2:
The reinforcing ribs modify the structural parameters of the back plate by adding geometric features that increase moment of inertia and section modulus in critical areas. This changes the mechanical properties of the back plate locally, enhancing its load-bearing capacity without significantly increasing the overall complexity of the manufacturing process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The addition of reinforcing ribs significantly enhances the strength of the back plate, thereby improving the reliability and performance of the MEMS microphone.
Implementation Method 1
the back plate includes a body portion, a fixing portion connected with the body portion and the substrate, and a plurality of strip reinforcing ribs, the reinforcing ribs are protruded from the body portion
Implementation Method 2
a capacitive system located on the substrate, including a back plate and a diaphragm opposite to the back plate
Data Source
AI summary
A MEMS microphone, includes a substrate with a back cavity, and a capacitive system located on the substrate, including a back plate and a diaphragm opposite to the back plate, wherein the back plate includes a body portion, a fixing portion connected with the body portion and the substrate, and a plurality of strip reinforcing ribs, the reinforcing ribs are protruded from the body portion. Compared with the related art, the MEMS microphone disclosed by the present disclosure could improve the strength of the back plate.