MEMS Micro-Mirror Array Beam Steering for Multi-Target Illumination
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Solution Overview
Problem
Current laser beam steering technologies are limited in their ability to simultaneously track and illuminate multiple targets per frame within a field-of-view, due to speed constraints and high size, weight, power, and cost (SWaP-C) limitations, especially when using mechanical steering, and require significant investment in materials and calibration for different wavelengths.
Innovation Solution
A Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) is used for adaptive beam steering, allowing for simultaneous illumination of multiple targets by segmenting the array based on target lists, range, and threat levels, and enabling multiple modes of operation such as designation, range finding, and active imaging at different wavelengths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If mechanical beam steering is used to track and illuminate targets, then the system can achieve precise target designation, but the system suffers from high size, weight, power, and cost (SWaP-C) limitations and cannot illuminate multiple targets per frame
Solution Approach 1:
The patent divides the beam steering function into multiple independent MEMS mirror devices, each capable of steering a laser beam to a different target. This segmentation allows simultaneous illumination of multiple targets while keeping each individual MEMS device small, lightweight, and low-power compared to a single mechanical steering system.
Solution Approach 2:
The patent replaces mechanical beam steering systems with solid-state MEMS mirror arrays. The MEMS mirrors use electrostatic actuation instead of mechanical gears, motors, or moving parts, eliminating the SWaP-C penalties associated with mechanical systems while enabling rapid, independent steering of multiple laser beams to multiple targets simultaneously.
2Productivity
If multiple beam steering devices are used to illuminate multiple targets simultaneously, then the productivity increases, but the device complexity and SWaP-C increase
Solution Approach 1:
The patent designs each MEMS mirror device to be a universal, multi-functional unit that can steer laser beams across the entire field of view and support multiple operational modes (designation, range finding, active imaging). This universality allows the system to achieve multiple target illumination without proportionally increasing complexity, as each device performs all necessary functions independently.
Solution Approach 2:
The patent employs dynamically controllable MEMS mirrors that can rapidly change their angular position and steering direction electronically. This dynamic control capability allows the system to adaptively allocate beam steering resources to different targets as needed, achieving high productivity without requiring a fixed, overly complex physical architecture.
3Adaptability or versatility
If a single beam steering device is used, then the device complexity is low, but the system cannot simultaneously track and illuminate multiple targets per frame
Solution Approach 1:
The patent segments the beam steering functionality into multiple independent MEMS mirror devices, where each device handles a portion of the total target illumination task. This segmentation enables the system to simultaneously track and illuminate multiple targets by distributing the workload across multiple simple, identical units rather than requiring one complex steering mechanism.
Solution Approach 2:
The patent combines multiple identical MEMS mirror devices into a unified beam steering system that operates as a coordinated ensemble. Each device is controlled independently but works together to achieve the overall goal of multi-target illumination, merging simple individual units into a versatile multi-functional system without proportionally increasing individual device complexity.
4Adaptability or versatility
If different wavelengths are used for different operational modes, then the system can perform multiple modes of operation, but the manufacturing precision and calibration requirements increase
Solution Approach 1:
The patent applies wavelength-specific optical coatings to specific regions or surfaces of the MEMS mirror devices. Each coating is optimized for a particular wavelength range corresponding to a specific operational mode (e.g., 1064 nm for designation, 1550 nm for range finding). This local quality approach allows the system to support multiple wavelengths and modes while maintaining manufacturing precision, as each coated region handles only its designated wavelength without requiring the entire device to be calibrated for all wavelengths.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The MEMS MMA enables rapid and precise steering of laser beams over a wide range, allowing for simultaneous targeting of multiple targets per frame with reduced SWaP-C and the ability to perform multiple modes of operation without the need for multiple devices, enhancing the flexibility and efficiency of laser systems.
Implementation Method 1
A Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) is used for adaptive beam steering
Data Source
AI summary
A multiple target tracker and beam steerer utilizes a MEMs MMA for beam steering to simultaneously illuminate multiple tracked targets per frame. The MMA can be adaptively segmented to change the number of output beams, and the power in a given beam, based on a list of tracked targets, range to targets, threat level etc. The MMA can be adaptively configured to simultaneously perform one or more Designation, Range Finding and Active Imaging modes on the same or different tracked targets. The MMA can be segmented so that each segment includes a plurality of mirrors to “oversample” the input beam. The mirrors in a given segment may be controlled to provide wavefront correction to the corresponding output beam.


