MEMS Bending Beam with Multi-Topology Circuits for Resonance Control

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Solution Overview

Problem

Existing MEMS systems with bending beams lack the capability to provide multiple resonance frequencies and magnetic actuation, limiting their versatility and application in resonator technologies.

Innovation Solution

A microsystem with a flexible bending beam incorporating multiple current circuits of different topologies, arranged on a silicon substrate, which interact with magnetic elements to generate various vibratory modes and resonance frequencies through Lorentz forces, allowing for magnetic actuation and easy manufacturing using CMOS and epitaxial techniques.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a single bending beam structure is used, then the manufacturing process is simple, but the system can only provide one resonance frequency

Engineering Contradiction:

Improveresonance frequency capabilityVSAvoidcircuit topology

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent implements multi-functionality by integrating multiple circuits with different topologies (series, parallel, bridge) into a single bending beam structure. Each circuit topology generates a distinct resonance frequency, allowing one physical structure to serve multiple resonator functions simultaneously, thereby resolving the contradiction between simplicity and versatility.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent applies dynamics by making the resonator's operational characteristics changeable through different circuit configurations. The same physical bending beam can dynamically switch between different resonance frequencies by activating different circuit topologies, enabling adaptability without requiring multiple fixed structures.

Inventive Principle:

Principle #15Dynamics

2Adaptability or versatility

If electrostatic actuation is used, then the manufacturing is straightforward, but magnetic actuation capability is missing

Engineering Contradiction:

Improveactuation methodVSAvoidmanufacturing process

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent achieves multi-functionality in actuation by designing the bending beam with both electrostatic and magnetic actuation capabilities. The structure incorporates magnetic elements that enable magnetic field actuation while maintaining compatibility with standard CMOS manufacturing processes, thus providing dual actuation methods without significantly complicating fabrication.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If multiple resonators are provided to achieve different resonance frequencies, then the versatility is improved, but the device complexity increases

Engineering Contradiction:

Improveresonance frequency optionsVSAvoidnumber of components

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent applies merging by combining multiple resonator functions into a single integrated bending beam structure. Instead of providing separate resonators for different frequencies, the invention merges multiple circuit topologies within one physical structure, reducing component count while maintaining versatility in resonance frequency generation.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the creation of a single MEMS system capable of multiple resonance frequencies and magnetic actuation, expanding its application in resonator technologies and simplifying the manufacturing process.

Implementation Method 1

a first circuit having a first topology for generating, in response to one current flowing through said first circuit, a force having an effect on said beam at one particular place so as to cause a first vibratory mode

Methodology Applied

Scientific EffectLorentz force: Lorentz Force

Implementation Method 2

a second circuit having a second topology for generating, in response to one current flowing through said second circuit, a force having an effect on said beam at one particular second position so as to cause a second vibratory mode

Methodology Applied

Scientific EffectLorentz force: Lorentz Force

Implementation Method 3

at least one magnetic element for creating a magnetic field

Methodology Applied

Scientific EffectMagnetic field interaction: Magnetic Field

Data Source

PatentUS8030805B2Microsystem comprising a bending beam and process of manufacture

Publication Date: 2011.10.04 STMICROELECTRONICS FRANCE

AI summary

A mechanical micro system comprising a flexible bending beam extending along a direction, and at least one magnetic element for creating a magnetic field. The flexible beam includes: a first circuit having a first topology for generating, in response to one current flowing through the first circuit, a force having an effect on the beam at one particular place so as to cause a first vibratory mode; a second circuit having a second topology for generating, in response to one current flowing through the second circuit, a force having an effect on the beam at one particular second position so as to cause a second vibratory mode.