MEMS Biochip Integrating Mechanical and Electrical Sensors
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Solution Overview
Problem
Current methodologies lack efficient and automated methods for simultaneous electrical and mechanical characterization of tissues at the nano- and micro-Newton range, which is crucial for accurate cancer diagnosis and pathology progression analysis.
Innovation Solution
A portable MEMS-based diagnostic system with a flexible biochip integrating mechanical and electrical micro-sensors on a single substrate, capable of simultaneous multi-parameter characterization, including electrical, mechanical, thermal, and potentially chemical and optical properties, using a micro-indentation mechanism and wireless data transmission for rapid and accurate diagnosis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If current methodologies are used for tissue characterization, then the diagnostic process is simpler, but the measurement precision and automation capability are insufficient
Solution Approach 1:
The patent combines multiple micro-sensors (mechanical, electrical, thermal) onto a single substrate to form an integrated multi-functional sensing platform. This merging approach enables simultaneous multi-parameter tissue characterization with high measurement precision while reducing the overall system complexity compared to using separate devices for each measurement type.
Solution Approach 2:
The sensing substrate is designed with multi-functional capabilities, integrating mechanical pressure sensors, electrical impedance sensors, and thermal sensors on a single platform. This universal design allows the same device to perform multiple tissue characterization functions simultaneously, improving measurement precision without proportionally increasing device complexity.
2Productivity
If manual tissue characterization methods are used, then the device operation is simpler, but the productivity and diagnostic speed are reduced
Solution Approach 1:
The system incorporates automated data acquisition and processing capabilities where the micro-sensors automatically measure tissue parameters and the integrated system processes the data without requiring manual intervention for each measurement step. This self-service approach significantly improves productivity and diagnostic speed while maintaining ease of operation through automated workflows.
Solution Approach 2:
The system implements real-time feedback through automated data processing and analysis, where measurement results are immediately processed and used to guide further diagnostic decisions. This feedback mechanism enhances productivity by eliminating manual analysis steps while maintaining ease of operation through intuitive automated decision support.
3Ease of manufacture
If separate sensors are used for different tissue parameters, then the manufacturing process is simpler, but the device complexity and measurement integration are increased
Solution Approach 1:
Multiple sensor types (mechanical, electrical, thermal) are merged onto a single substrate during the manufacturing process. This approach actually simplifies manufacturing compared to assembling multiple separate sensor devices, as it enables batch fabrication of integrated sensing platforms while reducing the complexity of system integration and calibration that would be required with separate sensors.
Solution Approach 2:
The manufacturing process utilizes parameter changes in the substrate material properties to enable integration of different sensor types. By modifying substrate characteristics during fabrication, the system achieves ease of manufacture for multi-functional sensors while maintaining low device complexity through material-based integration rather than mechanical assembly.
4Reliability
If comprehensive multi-parameter characterization is performed, then the diagnostic accuracy is improved, but the measurement time and process complexity are increased
Solution Approach 1:
The integrated sensing system performs mechanical, electrical, and thermal measurements simultaneously in a continuous process rather than sequentially. This continuity of useful action achieves comprehensive multi-parameter characterization that improves diagnostic reliability while minimizing measurement time, as all parameters are captured in a single integrated measurement routine.
Solution Approach 2:
Multiple measurement functions are merged into a single coordinated operation, where the multi-functional sensors capture different tissue parameters simultaneously. This merging approach maintains high diagnostic reliability through comprehensive characterization while reducing the total measurement time compared to sequential separate measurements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables expedited and accurate detection of tissue pathologies, including cancer, by providing deterministic and quantitative information on tissue properties, facilitating early disease progression analysis and diagnosis with high throughput and precision.
Implementation Method 1
mechanical micro-sensors
Implementation Method 2
electrical micro-sensors
Implementation Method 3
thermal micro-sensors
Implementation Method 4
micro-indentation mechanism controllably displaceable relative to the tissue to facilitate the acquisition of various properties
Data Source
AI summary
A MEM-based device and method of fabrication, the device comprising a biochip substrate comprising one or more compliant materials, a plurality of mechanical and electrical micro-sensors configured in an array to simultaneously measure electrical and mechanical properties of a sample, wherein a first mechanical micro-sensor is formed as a patterned layer of at least one of the compliant materials, wherein the patterned layer is coupled to a first pillar comprising a dielectric material formed onto the compliant materials, the first pillar being coated with a metal film at a contact surface with the sample and along a side of the first pillar to act as a conductive probe for the first electrical micro-sensor, and wherein the first pillar is formed on the first mechanical micro-sensor to transfer a force to the first mechanical micro-sensor.