MEMS Device In-Plane Actuation via Bridging Portion
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Solution Overview
Problem
Conventional MEMS devices that provide in-plane actuation movement are costly, time-consuming, and lack manufacturing flexibility, particularly when interconnecting multiple devices or with drive electronics, as they often require complex processes involving out-of-plane actuation and reconnection.
Innovation Solution
A MEMS device design featuring a closed loop wall structure with a bridging portion that allows displacement within the plane of manufacture, enabling in-plane movement without the need for reconnection, achieved through etching and bonding processes that maintain the device within a single material layer, allowing for flexible manufacturing and reduced interconnection requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional MEMS devices use out-of-plane actuation and reconnection to achieve in-plane movement, then in-plane actuation is achieved, but manufacturing cost increases, manufacturing time increases, and manufacturing flexibility decreases
Solution Approach 1:
The patent applies dimensionality change by using out-of-plane displacement of the bridging portion to achieve in-plane movement of the wall portions. The bridging portion moves perpendicular to the plane (through the thickness of the substrate) while causing the wall portions to move parallel to the plane, effectively converting displacement from one dimension to another. This resolves the contradiction by enabling in-plane actuation through a different dimensional approach that maintains manufacturing simplicity.
Solution Approach 2:
The bridging portion serves as an intermediary element that couples the actuation force to the wall portions. It mediates between the actuation force applied in the out-of-plane direction and the desired in-plane movement of the wall portions. The bridging portion translates the vertical displacement into lateral movement of the wall segments, enabling in-plane actuation without direct in-plane force application.
2Ease of operation
If conventional MEMS devices require out-of-plane actuation and reconnection for in-plane movement, then in-plane actuation is achieved, but manufacturing time increases
Solution Approach 1:
The device structure is pre-configured during manufacturing with the bridging portion positioned to enable direct in-plane actuation. The wall portions are arranged in non-contiguous segments that can be displaced in-plane through the bridging mechanism, eliminating the need for post-manufacturing reconnection operations. This preliminary structuring resolves the time loss by having the actuation capability built-in from the start.
3Ease of operation
If conventional MEMS devices use out-of-plane actuation and reconnection to achieve in-plane movement, then in-plane actuation is achieved, but manufacturing flexibility decreases
Solution Approach 1:
The bridging portion structure provides multi-functionality by enabling both structural support and actuation transmission. It serves as a universal element that can accommodate different wall configurations and actuation scenarios while maintaining the same basic mechanism. This universality resolves the flexibility issue by providing a versatile solution that adapts to various manufacturing requirements without requiring specialized processes.
4Ease of manufacture
If MEMS device components are manufactured separately and then connected, then device assembly is achieved, but manufacturing cost increases and reliability decreases
Solution Approach 1:
The patent merges the wall portions and bridging portion into a single integrated structure formed from one continuous piece of substrate material. The wall portions are non-contiguous segments of the same substrate, connected through the bridging portion without requiring separate assembly operations. This merging eliminates connection interfaces that would reduce reliability and simplifies manufacturing by forming the entire structure in a single etching process.
Solution Approach 2:
The entire device structure is formed from homogeneous substrate material throughout, with no material interfaces or joints between different components. The wall portions and bridging portion are all made from the same substrate, ensuring uniform mechanical and electrical properties. This homogeneity resolves the reliability issue by eliminating potential failure points at material interfaces while maintaining ease of manufacture through single-material processing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables cost and time savings by allowing mass production of devices with in-plane movement within a continuous process flow, reducing the need for individual component connections and enhancing manufacturing flexibility while maintaining high reliability and energy efficiency.
Implementation Method 1
an MEMS actuator in which an electric field is applied across a piezoelectric material to produce a small strain, which is used to actuate the device
Data Source
Figure 1
Figure 2~3B
Figure 4A~4B
AI summary
A MEMS device, and method of fabrication thereof, comprising: a wall arranged as a closed loop(for example, comprising a plurality of interconnected lengths (11-18)); and a bridging portion (54) having two ends and an intermediate portion between these ends; the bridging portion (54) is connected at one end to a first portion of the wall and at the other end to a second portion of the wall non-contiguous to the first; whereby when the intermediate portion is displaced in a direction through a plane defined between the two ends, the portions of the wall connected to the bridging portion (54) are each displaced in a respective direction in the plane, and at least one further portion of the wall is displaced in a direction that is in the plane and that is different to the directions that the two portions connected to the bridging portion (54) are displaced in.