Multi-Axis MEMS Actuator for Compact Camera Image Stabilization

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Solution Overview

Problem

Current miniaturized actuators for camera packages face challenges in providing compact, low-power, and cost-effective solutions for multi-axis movement within the constraints of portable devices, imaging devices, and medical instruments, where traditional actuators are insufficient in terms of size and efficiency.

Innovation Solution

A multi-axis MEMS assembly is developed, comprising an in-plane MEMS actuator and an out-of-plane MEMS actuator, where the out-of-plane actuator is a multi-morph piezoelectric actuator with a bending piezoelectric design, enabling linear three-axis movement by coupling a moveable stage to a rigid frame assembly through deformable piezoelectric portions, and an optoelectronic device is integrated to provide image stabilization and autofocus functions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If traditional actuators are used for multi-axis movement in camera packages, then sufficient movement capability is achieved, but the device size becomes too large and power consumption increases

Engineering Contradiction:
Improveactuator sizeVSAvoidmulti-axis movement capability
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent combines multiple actuator functions into a single integrated MEMS assembly. The in-plane MEMS actuator handles X-Y axis movement for image stabilization, while the out-of-plane MEMS actuator handles Z-axis movement for autofocus. This merging of multiple traditional actuators into one compact unit reduces overall size while maintaining full multi-axis movement capability.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The MEMS actuator assembly is designed to perform multiple functions within a single device. It provides both image stabilization (through in-plane movement) and autofocus (through out-of-plane movement), making it a universal actuation system that replaces what would traditionally require separate dedicated actuators for each function.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Power

If traditional actuators are used for camera packages, then adequate power delivery is achieved, but power consumption becomes excessive

Engineering Contradiction:
Improveactuation power deliveryVSAvoidpower consumption
Core Design Contradiction:
PowerVSUse of energy by moving object

Solution Approach 1:

The patent replaces traditional mechanical actuators with MEMS (micro-electrical-mechanical systems) actuators. This substitution enables precise electrical control of mechanical movement at the micro-scale, significantly reducing power consumption while maintaining adequate power delivery for actuation. The MEMS technology allows for efficient energy conversion and controlled actuation with minimal power requirements.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Volume of moving object

If miniaturized actuators are used to reduce size, then compactness is achieved, but manufacturing complexity increases

Engineering Contradiction:
Improveactuator sizeVSAvoidmanufacturing complexity
Core Design Contradiction:
Volume of moving objectVSEase of manufacture

Solution Approach 1:

The patent segments the actuator system into distinct functional modules: an in-plane MEMS actuator for X-Y movement and an out-of-plane MEMS actuator for Z-axis movement. This segmentation allows each module to be optimized and manufactured separately using standard MEMS fabrication techniques, then integrated into a complete assembly. The modular approach simplifies manufacturing compared to attempting to create a monolithic multi-axis actuator.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs a nested structure where the in-plane MEMS actuator and out-of-plane MEMS actuator are integrated in a compact arrangement. The out-of-plane actuator is positioned to work in conjunction with the in-plane actuator, creating a nested configuration that maximizes space utilization. This nesting enables compact form factor while maintaining ease of manufacture through standardized integration processes.

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables compact, low-power, and cost-effective linear three-axis movement, enhancing the performance of camera packages by integrating image stabilization and autofocus capabilities within the constraints of miniaturized camera systems.

Implementation Method 1

The out-of-plane MEMS actuator may include a multi-morph piezoelectric actuator

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS11327276B2MEMS actuation system
Publication Date: 2022.05.10 MEMS DRIVE (NANJING) CO LTD
  • US11327276B2 patent drawing
  • US11327276B2 patent drawing
  • US11327276B2 patent drawing

AI summary

A multi-axis MEMS assembly includes a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement. The micro-electrical-mechanical system (MEMS) actuator includes: an in-plane MEMS actuator, and an out-of-plane MEMS actuator. An optoelectronic device is coupled to the micro-electrical-mechanical system (MEMS) actuator. The out-of-plane MEMS actuator includes a multi-morph piezoelectric actuator.